Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
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Excimer laser induced ablation of PMMA and PET

엑시머 레이저를 이용한 PMMA와 PET의 가공

  • Shin, Dong-Sik (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Lee, Je-Hoon (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Seo, Jung (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Kim, Do-Hoon (Dept. of Metallugical System Engineering, Yonsei University)
  • 신동식 (한국기계연구원 레이저응용시스템그룹) ;
  • 이제훈 (한국기계연구원 레이저응용시스템그룹) ;
  • 서정 (한국기계연구원 레이저응용시스템그룹) ;
  • 김도훈 (연세대학교 금속공학과)
  • Published : 2003.04.01
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Abstract

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

Keywords