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http://dx.doi.org/10.21289/KSIC.2020.23.4.693

A Study on the Fabrication of Laser-Induced Graphene Humidity Sensor for Mounting on a Disposable Mask  

Lee, Jun-Uk (Dept. of Cogno Mechatronics Engineering, Pusan National University)
Shin, Yun-Ji (Dept. of Optics and Mechatronics Engineering, Pusan National University)
Yang, Hye-Jeong (Dept. of Cogno Mechatronics Engineering, Pusan National University)
Shin, Bo-Sung (Dept. of Cogno Mechatronics Engineering, Pusan National University)
Publication Information
Journal of the Korean Society of Industry Convergence / v.23, no.4_2, 2020 , pp. 693-699 More about this Journal
Abstract
355nm UV pulse laser is irradiated on the surface of polyimide (PI) by LDW (Laser Direct Writing) method to produce a high sensitivity flexible humidity sensor using a simple one-step process. The LDW method continuously investigates 2-D CAD data using a galvano scanner and an F-lens. This method is non-contact, so it minimizes physical strain on the PI. Laser-induced graphene (LIG) produced by lasers has a high surface area due to its high flexibility and numerous pores and oxidizers compared to conductors. For this reason, it is highly useful as a flexible humidity sensor. The humidity sensor produced in this study was attached to the inside of a mask filter, which has become a hot topic recently, and its applicability was confirmed.The measurement of humidity measured the sensitivity, reactivity, stability and recovery behavior of the sensor by measuring changes in capacitance and resistance.
Keywords
Laser Direct Writing (LDW); Laser Induced Graphene (LIG); Flexible; Polyimide (PI);
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