• 마이크로전자및패키징학회지
• /
• 제25권1호
• /
• pp.11-15
• /
• 2018

본 논문에서는 UV 나노임프린트 공정으로 제작한 나노 콘 형태의 구조물 위에 은 나노 입자를 증착하여 광증폭용 구조 형태를 제작하고자 하였다. 은 나노 입자의 증착은 하부 기판 표면의 젖음 특성에 따른 액적의 증발 거동을 이용하였으며, 기판 하부 열에너지의 차이에 따라서 액적 중심부부터 가장자리까지 증착 형태가 변화함을 확인하였다. 제작한 구조 형태와 유사한 구조를 시간영역 유한차분(FDTD)법을 통해 광 특성을 예측하여, 최종적으로 제작한 구조의 은나노 입자 부근에 에너지가 집중되는 결과를 확인하였다.

• 한국초전도ㆍ저온공학회논문지
• /
• 제6권3호
• /
• pp.6-11
• /
• 2004

YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) films were deposited on MgO(100) and SrTiO$_3$(100) single crystal substrates by cold-wall type MOCVD method using continuous source supplying system. Under the deposition temperature of 740∼76$0^{\circ}C$, c-axis oriented YBCO films were obtained. In case of the YBCO films deposited on MgO (100) single crystal substrate, the critical temperature (T$_{c}$) was under 81 K regardless of the deposition conditions, whereas T$_{c}$ of the YBCO films deposited on SrTiO$_3$(100) single crystal substrate was 83∼84 K. The critical current (I$_{c}$) of the YBCO film deposited on SrTiO$_3$(100) single crystal substrate for 30 min was 49 A/cm-width and the critical current density (J$_{c}$) was 0.82 MA/$\textrm{cm}^2$ to film thickness of 0.6 ${\mu}{\textrm}{m}$. I$_{c}$ increased to 84.4 A/cm-width as the deposition time increased to 50 min, but J$_{c}$ decreased to 0.53 MA/$\textrm{cm}^2$ to film thickness of 1.8 ${\mu}{\textrm}{m}$.rm}{m}$.

• 한국전기전자재료학회논문지
• /
• 제27권5호
• /
• pp.269-275
• /
• 2014

In this study, chemical bath deposition method was used to grow Zinc sulfide(ZnS) thin films from $NH_3/SC(NH_2)_2/ZnSO_4$ solutions at $90^{\circ}C$. ZnS thin films have been prepared onto ITO glass. The concentrations of $ZnSO_4$ and $NH_3$ were varied while the concentration of Thiourea was fixed in 0.52 M. Structural, optical, electrical characteristic of ZnS thin films were measured. The physical and optical properties of different ZnS thin films were influenced severely by the concentration of the two reacting chemicals. The optimal concentration of $ZnSO_4$ and $NH_3$ was 0.085 M and 1.6 M, respectively.

• 한국진공학회지
• /
• 제13권2호
• /
• pp.59-64
• /
• 2004

반도체 레이저를 광원으로 사용하는 원자흡수분광 방법으로 금속증기의 증착 공정을 감시하는 연구를 수행하였다. 전자빔 가열 방식을 이용하여 gadolinium (Gd) 금속을 대량으로 증발시켰다. 파장 영역이 770-794 nm (중심파장 780 nm)인 반도체 레이저빔과 388-396 nm 영역의 제 2 고조파 빔을 진공용기에 입사시켜 증발되는 금속증기의 원자흡수 스펙트럼을 실시간으로 기록하였다. 흡수 스펙트럼을 분석하여 증기의 원자밀도를 구했다. 전자빔 출력을 변화시키면서 측정한 원자밀도를 수정 결정 모니터 장치를 사용하여 측정한 증착률과 비교하였다. 산업적으로 많이 사용되는 Ti 등의 증착 공정 감시에 이 실험에서 구현한 레이저 분광장치를 적용할 수 있다는 것을 제시하였다.

• 전기학회논문지
• /
• 제56권1호
• /
• pp.117-122
• /
• 2007

LB method is one of the most interesting technique to arrange certain molecular groups at precise position relative to others. Also, the LB deposition technique can fabricate extremely thin organic films with a high degree of control over their thickness and molecular architecture. In this way, new thin film materials can be built up at the molecular level, and the relationship between these artificial structures and the properties of materials can be explored. In this paper, evaluation of physical properties was made for dielectric relaxation phenomena by the detection of the surface pressures and displacements current on the monolayer films of phospolipid monomolecular DLPC. Lipid thin films were manufacture by detecting deposition for the accumulation and the current was measured after the electric bias was applied across the manufactured MIM device. It is found that the phospolipid monolayer of dielectric relaxation takes a little time and depend on the molecular area. When electric bias is applied across the manufactured MIM device by the deposition condition of phospolipid mono-layer, it wasn't breakdown when the higher electric field to impress by increase of deposition layers.

• 한국연소학회:학술대회논문집
• /
• 한국연소학회 2007년도 제34회 KOSCO SYMPOSIUM 논문집
• /
• pp.19-24
• /
• 2007

The deposition behavior of soot particles in a diffusion flame along a solid wall was examined experimentally by getting rid of the effect of natural convection utilizing microgravity environment. The microgravity environment was realized by using a drop tower facility. The fuel for the flame was an ethylene ($C_2H_4$) and the surrounding oxygen concentration 35% with the surrounding air velocity of $V_a$=2.5, 5, and 10 cm/s. Laser extinction method was adopted to measure the soot volume fraction distribution between the flame and burner wall. The results show that observation of soot deposition in normal flame was difficult from buoyancy and the relative position of flame and solid surface changes with time. The soot particle distribution region moves closer to the surface of the wall as the surrounding air velocity is increased. And the experiments determined the trace of the maximum soot concentration line. It was found that the distance between soot line and flame line is around 5 mm. That is, the soot particle near the flame zone tends to move away from flame zone because of thermophoretic force and to concentrate at a certain narrow area inside of the flame, finally, to adhere the solid wall.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.180-181
• /
• 2006

As a rule, high temperature superconducting coated conductors have multi-layered buffers consisting of seed, diffusion barrier and cap layers. Multi-buffer layer deposition requires longer fabrication time. This is one of main reasons which increases fabrication cost Thus, single buffer layer deposition seems to be important for practical coated conductor process. In this study, a single layered buffer deposition of $CeO_2$ for low cost coated conductors has been tried using thermal evaporation technique 100nm-thick $CeO_2$ layers deposited by thermal evaporation were found to act as a diffusion layer. $0.4{\mu}m$-thick SmBCO superconducting layers were deposited by thermal co-evaporation on the $CeO_2$ buffered Ni-W substrate. Critical current of 118A/$cm^2$ was obtained for the SmBCO coated conductors.

• 한국환경보건학회:학술대회논문집
• /
• 한국환경보건학회 2003년도 Challenges and Achievements in Environmental Health
• /
• pp.76-85
• /
• 2003

Mass and elemental dry deposition fluxes and ambient particle size distributions were measured using dry deposition plates and a cascade impactor, from March to November 1998 in Seoul, Korea. During the spring sampling period several yellow sand events characterized by long range transport from China and Mongolia impacted the area. During these events the mass fluxes were statistically the same as during springtime non-yellow-sand events. However, most elemental fluxes were higher. In general, the flux ratios of both crustal (Al, Ca, Mn) and anthropogenic elements (Ni, Pb) to total mass measured during the daytime yellow-sand events were substantially higher than those measured in spring daytime during non-yellow-sand time periods. During all seasons the average measured daytime fluxes were about two times higher than at nighttime. The flux of primarily anthropogenic metals (Cu, Ni, Pb, Zn) and Mn was on average one to two orders of magnitude lower than the flux of the crustal metals Al and Ca. As is typically found two modes, fine (0.1∼l.0 $\mu\textrm{m}$) and coarse (1.0∼10.0 $\mu\textrm{m}$) were present in the measured size distributions (<10 $\mu\textrm{m}$). The particles in the coarse mode constitute a major portion of the measured mass size distribution during the yellow-sand events possibly due to the long-range transport of those particles from China.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.18-21
• /
• 2003

Fused Deposition Modeling (FDM) parts are made by piling up thin layers that cause the stair stepping effect at the surface of FDM parts. This effect brings about poor surface roughness of the part and requires additional post machining such as manual finishing that is detrimental to the part geometry and time consuming. Determining optimal build orientation for FDM parts can be one solution to minimize the post machining. However, by using the CAD model, calculating the optimal build orientation is impractical due to heavy computing process. In order to calculate the optimal build orientation with high speed. the surface roughness model based on measured data and interpolation is newly developed in this research. Also. the genetic algorithm (GA) is applied for acquiring reliable solution. Finally, It is verified from the test that the presented approach is very efficient for reducing the additional post machining process fer FDM parts.

• 한국초전도학회:학술대회논문집
• /
• 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
• /
• pp.145-145
• /
• 2000

Large area YBCO - films are series produced by thermal co-evaporation using a deposition scheme known as Garching process, which allows intermittent oxygen supply in a high vacuum ambient by an oxygen cup spaced closely underneath the moving substrates. The deposition area of 9" diameter is capable to handle very large wafers up to 8" diam. or numerous smaller wafers. The large distance between substrates and boat sources and an elaborate heater design guarantee excellent film uniformity over the entire deposition area. YBCO - films deposited by this technique are commercially fabricated for a variety of applications - the most prominent are resistive fault current limiters and microwave filters for mobile or satellite communications. IMUX and OMUX - filters are currently space qualined by Robert Bosch GmbH and are expected to be launched and installed on an experimental platform of the international space station ALPHA in 2001. Both of the above applications require quite different film specifications on the one hand, but at the same time extremely high uniformity and reproducibility on the other hand, since hundreds of YBCO - films are combined to large systems or have to be approved for manned space missions. The success of such projects is direct evidence that the technique of thermal evaporation is readily capable to meet these high demands and has become the major deposition technique to support the emerging HTS market.