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Semiconductor laser-based absorption spectroscopy for monitoring physical vapor deposition process  

정의창 (한국원자력연구소 양자광학기술개발부)
송규석 (한국원자력연구소 양자광학기술개발)
차형기 (한국원자력연구소 양자광학기술개발부)
Publication Information
Journal of the Korean Vacuum Society / v.13, no.2, 2004 , pp. 59-64 More about this Journal
Abstract
A study on the semiconductor laser-based atomic absorption spectroscopy was performed for monitoring physical vapor deposition process. Gadolinium metal was vaporized with a high evaporation rate by electron beam heating. Real-time atomic absorption spectra were measured by using tunable semiconductor laser beam at 770-794 nm (center wavelength of 780 nm) and its second harmonic at 388-396 nm. Atomic densities of metal vapor can be calculated from the absorption spectra measured. We plot the atomic densities as a function of the electron beam power and compare with the evaporation rates measured by quartz crystal monitor. We demonstrate that the semiconductor laser-based spectroscopic system developed in this study can be applied to monitor the physical vapor deposition process for other metals such as titanium.
Keywords
Semiconductor laser; Atomic absorption spectroscopy; Physical vapor deposition; Electron beam;
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1 /
[ W.Wang;M.M.Fejer;R.H.Hammond;M.R.Beasley;C.H.Ahn;M.L.Bortz;T.Day ] / Appl. Phys. Lett.   DOI
2 /
[ J.Doychak ] / J. Organomet. Chem.   DOI   ScienceOn
3 /
[ C.Lu;Y.Guan ] / J. Vac. Sci. Technol.
4 /
[ A.Ray;A.Majumdar ] / J. Vac. Sci. Technol.
5 /
[ E.C.Jung;K.H.Ko;S.P.Rho;C.Lim;C.J.Kim ] / Opt. Commun.   DOI
6 /
[ W.Wang;R.H.Hammond;M.M.Fejer;S.Amason;M.R.Beasley;M.L.Bortz;T.Day ] / Appl. Phys. Lett.   DOI   ScienceOn
7 /
[ T.M.Anklam;L.V.Berzins;D.G.Braun;C.Haynam;T.Meier;M.A.McClelland ] / Surf. Coat. Technol.   DOI
8 /
[ L.V.Berzins;T.M.Anklam;F.Chambers;S.Calani;C.A.Haynam;E.F.Worden ] / Surf. Coat. Technol.
9 /
[ W.Wang;R.H.Hammond;M.M.Fejer;C.H.Ahn;M.R.Beasley;M.D.Levenson;M.L.Bortz ] / Appl. Phys. Lett.   DOI   ScienceOn
10 /
[ V.A.Komarovskii ] / Opt. Spectrosc.
11 /
[ S.J.Benerofe;C.H.Ahn;M.M.Wang;K.E.Kihlstrom;K.B.Do;S.B.Amason;M.M.Fejer;T.H.Geballe;M.R.Beasley;R.H.Hammond ] / J. Vac. Sci. Technol.
12 /
[ C.S.Lu ] / Vac. Sci. Technol.   DOI   ScienceOn
13 /
[ S.A.Chalmers;K.P.Killeen ] / Appl. Phys. Lett.   DOI   ScienceOn
14 /
[ C.H.Corliss;W.R.Bozman ] / Experimental Transition Probabilities for Spectral Lines of Seventy Elements
15 /
[ W.Wang;R.H.Hammond;M.M.Fejer;M.R.Beasley ] / J. Vac. Sci. Technol.
16 /
[ 정의창;권덕희;고광훈;김택수 ] / 한국진공학회지
17 /
[ J.W.Cobum;O.Auciello(ed.);D.L.Flamm(ed.) ] / Plasma Diagnostics vol. 2, Surface Analysis and Interactions
18 /
[ H.L.Chen;L.J.Radziemski,R.W.(ed.);R.W.Solarz(ed.);J.A.Paisner(ed.) ] / Laser Spectroscopy and its Applications