• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.501-504
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• 1999

In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

• 반도체디스플레이기술학회지
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• 제20권1호
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• pp.59-63
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• 2021

Upper electrode is one of core parts using plasma etching process at semiconductor. The purpose of this study is to analyze effects of cutting conditions for mechanical machining of silicon upper electrode. For this research, surface roughness of machined workpiece and depth of damage inside of silicon electrode are experimented and analyzed and different values of feed rate and depth of cut are applied for the experiments. From these experiments, it is verified that the surface roughness and internal damaged layer get worse according to take more fast feed rate. In conclusion, cutting condition is very important factor for machining. Results of this study can use to develop various parts which are made from single crystal silicon and affect various benefits to the semiconductor industry for better productivity.

• 한국지반환경공학회 논문집
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• 제24권12호
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• pp.47-52
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• 2023

지역난방사업자가 운영하는 열수송관의 효율적인 유지관리를 위해 사업자가 구축한 설비이력 및 파손이력 데이터를 활용하여 파손발생과 연관성을 가지는 주요 독립변수를 확인한 후, 파손빈도와의 상관관계를 분석하고, 파손빈도 추정을 위한 기본모델을 도출하였다. 국내외 지역난방사업자가 기존에 활용 중인 사용기간 기반의 추정 모델과의 연관성을 고려하여 사용기간 뿐만 아니라 관경, 매설깊이, 감시시스템 절연레벨 등 연속형 변수와 파손빈도의 상관성이 가장 높은 독립변수로 단순회귀분석 기본모델을 제시하였으며, 나머지 독립변수는 기본모델을 수정, 보완하는 인자로 반영하였다. 분석 결과 기존 연구사례와 마찬가지로 사용기간과 파손빈도간 분석 모델의 적합성과 두 변수간 상관성이 가장 높은 것으로 확인되어 기본모델로 활용 가능하다. 관경, 매설깊이, 감시시스템 절연레벨 정보 역시 파손빈도와의 상관성이 확인되어 기본모델을 보완하기 위한 인자로 활용 가능하다.

• 대한토목학회논문집
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• 제31권4A호
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• pp.311-321
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• 2011

RC 슬래브에 배근되는 철근비와 충격체의 충돌속도가 국부손상에 미치는 영향을 평가하기 위하여 일련의 충돌해석을 수행하였다. 해석결과, 철근비는 관입깊이 및 관통두께에 별 다른 영향을 미치지 않았으며, 후면 콘크리트의 탈락면적에는 큰 영향을 미치는 것으로 나타났다. 충격체의 충돌속도가 증가할수록 철근콘크리트 슬래브의 국부손상 정도는 증가하는 경향을 보였다. 이상의 해석결과는 격납건물 및 구조물의 내충격설계시 유용한 자료로 활용될 수 있을 것으로 기대된다.

• Steel and Composite Structures
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• 제23권2호
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• pp.161-172
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• 2017

A new composite tube connection method called the pre-tightened teeth connection technique is proposed to improve the composite tube connection efficiency. This paper first introduces the manufacturing process of the proposed technique. It then outlines how the mechanical properties of this technology were tested using four test groups. The factors that influence the load-bearing capacity and damage model of the connection were analyzed, and finally, the transfer load mechanism was investigated. The following conclusions can be obtained from the research results. (1) The new technique improves the compressive connection efficiency by a maximum of 79%, with the efficiency exceeding that of adhesive connections of the same thickness. (2) Changing the depth of teeth results in two types of damage: local compressive damage and shear damage. The bearing capacity can be improved by increasing the depth, length, and number of teeth as well as the pre-tightening force. (3) The capacity of the technique to transfer high loads is a result of both the relatively high interlaminar shear strength of the pultruded composite and the interlaminar shear strength increase provided by the pre-tightening force. The proposed technique shows favorable mechanical properties, and therefore, it can be extensively applied in the engineering field.

• Corrosion Science and Technology
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• 제20권6호
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• pp.435-450
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• 2021

The interest in eco-friendly energy is increasing, and polymer electrolyte membrane fuel cell (PEMFC) is attracting attention as alternative power sources. Research on metallic bipolar plates, a fuel cell component, is being actively conducted. However, since the operating conditions of PEMFC, in which sulfuric acid (H₂SO₄) and hydrofluoric acid (HF) are mixed, are strong acidity, the durability of the metallic bipolar plate is very important. In this research, the electrochemical characteristics and corrosion damage behavior of 316L stainless steel, a material for metallic bipolar plates, were analyzed through potentiostatic corrosion tests with test times and chloride concentrations. As the test times and chloride concentrations increased, the current density and corrosion damage increased. As a result of observation with scanning electron microscope(SEM) and 3D microscope, both the depth and width of pitting corrosion increased with increases in test times and chloride concentrations. In particular, the pitting corrosion damage depth at test conditions of 6 hours and 1000 ppm chloride increased the most. The growth of the pitting corrosion damage was not directly proportional to time and increased significantly after a certain period.

• 한국터널지하공간학회 논문집
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• 제11권4호
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• pp.327-351
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• 2009

본 논문은 대심도 또는 과지압 암반에서 2차지압으로 인해 발생되는 취성파괴와 관련한 실내실험을 수행하고, 취성파괴 현상을 잘 예측할 수 있는 CWFS(Cohesion Weakening Frictional Strengthening)모델을 이용한 수치해석을 수행하였다. 암석의 거동을 분석하고 손상의 함수인 암석강도정수를 도출하기 위하여 일축압축강도실험과 손상제어실힘을 수행하였다. 일축압축강도실험결과 균열개시응력은 화강암, 편마암 구분 없이 일축압축강도의 41~42% 정도로 분석되었으며, 반면 균열손상응력은 화강암은 일축압축강도의 75%, 편마암은 일축압축강도의 97%의 값으로 분석되었다. 손상제어실험결과 균열손상응력과 최대하중은 Peak하중 이후 감소하는 것으로 나타났다. 또한 점착력은 감소하고 마찰각은 증가하는 양상을 보였다. Peak하중 이전에는 탄성계수가 증가하고 Peak하중 이후에는 감소하였다. 그리고 포아송비는 손상이 진행될수록 증가하는 양상을 보였다. 일축압축강도실험과 손상제어실험의 균열개시응력과 균열손상응력의 비교분석결과 손상제어실험의 균열개시응력은 일축압축강도실험에서 얻어진 균열개시응력의 범위에서 변화하는 양상을 보였고, 균열손상응력은 일정 손상수준에서 일축압축강도실험에서 얻어진 값보다 작은 값으로 나타났다. 실내실험결과로부터 CWFS모델의 입력 파라미터를 도출하여 수치해석에 적용하여 취성파괴 발생 한계토피고를 구했다. CWFS모델을 이용한 수치해석으로부터 예측된 한계토피고와 손상지수로부터 예측된 한계토피고를 비교한 결과, 취성파괴 발생 한계토피고를 정확히 예측하지 못하는 결과를 나타냈다. 따라서 원형터널에만 적용기한 손상지수를 사용하는 것은 문제가 있다고 판단된다. 이를 개선하기 위해 터널의 형상을 고려한 형상계수를 손상지수에 적용하였다. 터널의 형상을 고려한 수정된 손상지수로부터 예측된 한계토피고는 수치해석결과와 거의 동일한 결과를 보였다.

• 한국압력기기공학회 논문집
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• 제14권2호
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• pp.49-58
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• 2018

The regulatory periodic inspection program (PSI) conducted at every overhaul period is the most important process for confirming the safety of nuclear power plants. The PSI for operating nuclear power plants in Korea mainly consist of component level performance check that had been developed based on deterministic approach putting the same degree of importance to all the inspection items. This inspection methodology is likely to be effective for preoperational inspection. However, once the plant is put into service, the PSI must be focused on whether to minimize the risk of accident using defense-in-depth concept and risk insight. The incorporation of defense-in-depth concept and risk insight into the deterministic based safety inspection has not been well studied so far. In this study, two track approaches are proposed to make sure that core damage be avoided: one is to secure success path and the other to block the failure path in a specific event tree of PSA. The investigation shows how to select safety important components and how to set up inspection group to ensure that core damage would not occur for a given initiating event, which results in strengthening defense-in-depth level 3.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2002년도 가을 학술발표회 논문집
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• pp.334-341
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• 2002

Nowadays, owing to the development of analysis techniques for PDA test, we can evaluate the serious damage of pile during driving in site. In this study, we checked the damage of pile by pulling it out after evaluation of the pile damage during driving by PDA testing. After that, almost damaged pile was checked and the outline depth of damage could be verified. To increase the quality of driven pile, we have to increase the number of PDA testing for drivability analysis with checking the damage especially for preliminary pile driving and dynamic load test for checking the bearing capacity and consider the application of driving by energy monitoring.

• 한국전기전자재료학회논문지
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• 제16권4호
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• pp.280-285
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• 2003

The influence of silicon surface damage on nickel-silicide (NiSi) has been characterized and H$_2$ anneal and TiN rapping has been applied to suppress the electrical, morphological deterioration phenomenon incurred by the surface damage. The substrate surface is intentionally damaged using Ar IBE (Ion beam etching) which can Precisely control the etch depth. The sheet resistance of NiSi increased about 18% by the surface damage, which is proven to be mainly due to the reduced silicide thickness. It is shown that simultaneous application of H: anneal and TiN capping layer is highly effective in suppressing the surface damage effect.