A Comparative Study of Nanocrystalline HfN Coatings Fabricated by Direct Current and Inductively Coupled Plasma Assisted Magnetron Sputtering (DC 스퍼터법과 유도결합형 플라즈마 스퍼터법으로 증착된 HfN 코팅막의 물성 비교연구)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2017.05a
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- pp.103.1-103.1
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- 2017