Browse > Article
http://dx.doi.org/10.5695/JKISE.2008.41.3.088

Characteristics of Ir-Re Thin Films on WC for Lens Glass Molding by Ion Beam Assisted DC Magnetron Sputtering  

Park, Jong-Seok (Department of Materials Science and Engineering, Chonnam National University)
Park, Burm-Su (A. G. Optics Co.)
Kang, Sang-Do (A. G. Optics Co.)
Yang, Kook-Hyun (A. G. Optics Co.)
Lee, Kyung-Ku (R&D Center for Titanium and Special Alloys)
Lee, Doh-Jae (Department of Materials Science and Engineering, Chonnam National University)
Lee, Kwang-Min (Department of Materials Science and Engineering, Chonnam National University)
Publication Information
Journal of the Korean institute of surface engineering / v.41, no.3, 2008 , pp. 88-93 More about this Journal
Abstract
Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100 nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.
Keywords
Ir-Re; Ion beam assisted DC magnetron sputtering; Molding core; Tungsten carbide(WC);
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 M. J. Chen, D. Li, S. Dong, Journal of Materials Processing Technology, 129 (2002) 91-95   DOI   ScienceOn
2 H. U. Kim, S. H. Jeong, Y. P. Park, S. S. Kim, H. H. Kim, J. H. Kim, J. of KIEEME (in Korean), 19(11) (2006) 1050   과학기술학회마을   DOI   ScienceOn
3 H. U. Kim, S. H. Jeong, H. J Kim, J. H Kim, Key Engineering Materials, 345 (2007) 1577   DOI
4 William D. Westwood, Sputter Deposition, p. 136-141, AVS New York
5 Y. I. Chen, J. G. Duh, Surf. Coat. Technol. 46 (1991) 371   DOI   ScienceOn
6 J. Stallard, S. Poulat, D. G. Teer, Tribology International, 39 (2006) 159-166   DOI   ScienceOn
7 S. S. Kim, H. U. Kim, S. H. Jeong, H. H. Kim, J. H. Kim, J. of KIEEME (in Korean), 19(4) (2006) 386   과학기술학회마을   DOI   ScienceOn
8 H. Suzuki, S. Kodera, S. Maekawa, N. Morita, E. Sakurai, K. Tanaka, H. Takada, T. Kuriyagawa, K. Syoji, J. Japan Soc, Prec. Engg., 62(4), (1998) 619
9 H. U. Kim, S. S. Kim, H. J Kim, J. H Kim, J. of KlEEME(in Korean), 20(9) (2007) 808   과학기술학회마을   DOI   ScienceOn