Thickness Dependent Properties of Al-doped ZnO Film Prepared by Using the Pulsed DC Magnetron Sputtering with Cylindrical Target
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Shin, Beom-Ki
(Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yonsei University)
Lee, Tae-Il (Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yonsei University) Park, Kang-Il (SNTEK Co., Ltd.) Ahn, Kyoung-Jun (SNTEK Co., Ltd.) Myoung, Jae-Min (Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yonsei University) |
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