• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Biotechnology and Bioprocess Engineering:BBE
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• v.9 no.3
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• pp.156-165
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• 2004

Concentrations of substrates, glucose, and ammionia in biological processes have been on-line monitored by using glucose-flow injection (FIA) and ammonia-FIA systems. Based on the on-line monitored data the concentrations of substrates have been controlled by an on-off controller, a PID controller, and a neural network (NN) based controller. A simulation program has been developed to test the control quality of each controller and to estimate the control parameters. The on-off controller often produced high oscillations at the set point due to its low robustness. The control quality of a PID controller could have been improved by a high analysis frequency and by a short residence time of sample in a FIA system. A NN-based controller with 3 layers has been developed, and a 3(input)-2(hidden)-1(output) network structure has been found to be optimal for the NN-based controller. The performance of the three controllers has been tested in a simulated process as well as in a cultivation process of Saccharomyces cerevisiae, and the performance has also been compared to simulation results. The NN-based controller with the 3-2-1 network structure was robust and stable against some disturbances, such as a sudden injection of distilled water into a biological process.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.35 no.5
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• pp.26-36
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• 2003

The wet-end dynamics of a paper mill was analyzed to characterize its dynamic behavior during the grade change of paper. The model representing the wet-end section is developed based on the mass balance relationships written for the simplified wet-end white water network. From the linearization of dynamic model, higher-order Laplace transfer functions were obtained followed by the reduction procedure to give simple lower-order models in the form of 1$^{st}$-order or 2$^{nd}$ -order plus dead times. The dynamic response of the wet-end is influenced both by the white water volume and by the level of wire retention. Effects of key manipulated variables such as the thick stock flow rate, the ash flow rate and the retention aid flow rate on the major controlled variables were analyzed by numerical simulations. The simple dynamic model developed in the present study can be effectively used in the operation and control of paper mills.s.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.92-92
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• 2008

The surface flatness of heteroepitaxially grown 3C-SiC thin films is a key factor affecting electronic and mechanical device applications. This paper describes the surface flatness of polycrystalline 3C-SiC thin films by the gas flow control according to the location change of geometric structure. The polycrystalline 3C-SiC thin film was deposited by APCVD(Atmospheric pressure chemical vapor deposition) at $1200^{\circ}C$ using HMDS(Hexamethyildisilane : $Si_2(CH_3)_6)$ as single precursor, and 5 slm Ar as the main flow gas. According to the location of geometric structure, surface fringes and flatness changed. It shows the distribution of thickness is formed uniformly in the specific location of the geometric structure.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.151-157
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• 2005

In the chemical, mineral and electronics industries, mechanically stirred tanks are widely used for complex liquid and particle mixing processes. In order to understand the complex phenomena that occur in such tanks, it is necessary to investigate flow field in the vessel. Most difficulty on the numerical analysis of stirred tank flow field focused particularly on free surface analysis. In order to decrease the dead zone and improve the flow efficiency of a system with free surface, this paper presents a new method that overcomes free surface effects by properly combining the benefits of using experiment and 3-D CFD. This method is applied to study the mixing flow in an agitated tank. From the results of experimental studies using the PIV (particle image velocimetry) system, the distribution of mixing flow including free surface are obtained. And these values that are expressed as a velocity vector field have been patched for simulating the free surface. The results of velocity distribution obtained by 3-D CFD are compared with those of experimental results. The experimental data and the simulation results are in good agreement.

• Korean Journal of Materials Research
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• v.12 no.11
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• pp.850-855
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• 2002

Silica powders were prepared from $SiCl_4$-$H_2$O system by chemical vapor deposition process, and investigated on size control of the products with reaction conditions. The products were amorphous and nearly spherical particles with 130nm~50nm in size. The size distribution became narrow with the increase of [$H_2$O]/[SiCl$_4$] concentration ratio. The particle size decreased with the increase of reaction temperature, [$H_2$O]/[SiCl$_4$] concentration ratio and total flow rate. The specific surface area measured by BET method was about three times larger than that of electron microscope method.

• Textile Coloration and Finishing
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• v.20 no.1
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• pp.8-15
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• 2008

We presented the modified decal-transfer lithography (DTL) and light stamping lithography (LSL) as new powerful methods to generate patterns of poly(dimethylsiloxane) (PDMS) on the substrate. The microstructures of PDMS fabricated by covalent binding between PDMS and substrate had played as barrier to locally control wettability. The transfer mechanism of PDMS is cohesive mechanical failure (CMF) in DTL method. In the LSL method, the features of patterned PDMS are physically torn and transferred onto a substrate via UV-induced surface reaction that results in bonding between PDMS and substrate. Additionally we have exploited to generate the patterning of rhodamine B and quantum dots (QDs), which was accomplished by hydrophobic interaction between dyes and PDMS micropatterns. The topological analysis of micropatterning of PDMS were performed by atomic force microscopy (AFM), and the patterning of rhodamine B and quantum dots was clearly shown by optical and fluorescence microscope. Furthermore, it could be applied to surface guided flow patterns in microfluidic device because of control of surface wettability. The advantages of these methods are simple process, rapid transfer of PDMS, modulation of surface wettability, and control of various pattern size and shape. It may be applied to the fabrication of chemical sensor, display units, and microfluidic devices.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.19 no.3
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• pp.280-287
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• 2009

High-tech microelectronics industry is known as one of the most chemical-intensive industries. In Korea, Microelectronics industry occupied 38% of export and 16% of working employees work in microelectronics industry. But, chemical information and health hazards of high-tech microelectronics manufacturing are poorly understood because of rapid development and its penchant for secrecy. We need to investigate on chemical use and exposure control. We Site-visits to 6 high-tech microelectronics manufacturing company which have cleanroom work using over 1,000kg organic solvents (5 semi-conductor chips and its related parts company, 1 liquid crystal display (LCD)). We reviewed their data on chemical use and ventilation system, and measured TVOCs (Total Volatile Organic Compounds) and carbon dioxide concentration. All cleanroom air passed through hepa filters to acheive low particle levels and only 1 cleanroom uses carbon filters to minimize the organic solvents exposures In TVOC screening test, Cleanroom for semi-conductor chips and its related parts company with laminar down flow system (e.g. class 1~100) showed nondetectable level of TVOCs concentration, but Cleanroom for liquid crystal display (LCD) with conventional flow system (e.g. class 1,000~10,000) showed 327 ppm as TVOCs. Acetone concentration in cleanroom for Jig cleaning, LC Injection, Sealing processes were 18.488ppm (n=14), 49.762 ppm (n=15), 8.656 ppm (n=14) as arithmetric mean. Acetone concentration in cleanroom for LCD inspection process was 40ppm (n=55) as geometric mean, where the range was 7.8~128.7ppm and weakly correlated with ventilation rate efficiency(r=0.44, p<0.05). To control organic solvents in cleanrooms, chemical and carbon filters should be installed with hepa filters. Even though their volatile organic compounds concentration was not exceed to occupational exposure limits, considering of entrance limited cleanroom environment, long-term period exposure effects and adverse health effects of cleanroom worker need further reseach.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.217-217
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• 2006

The surface energy control capability of electrohydrodynamic force provides electrospraying with various potential advantages such as simple particle size control, mono-dispersity, high recovery, and mild processing conditions. Herein, the one step nano-encapsulation of protein drugs using electrospraying was developed. The major processing parameters such as the conductivity of spraying liquids, flow rate, the distance between electric potentials, etc were examined to obtain the maximum efficiency. The recovery of particles was found relatively high as could be conjectured based on the principle of electrospraying. When organic solvents were employed, the processing windows of electrospraying were relatively narrow than water systems. Efficient nano-encapsulation of BSA with polymers was conveniently achieved using electrospraying at above 12 kV.

• 제어로봇시스템학회:학술대회논문집
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• 1998.10a
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• pp.501-506
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• 1998

A mathematical model is developed to describe the relationship between the manipulated variables (e.g. jacket inlet temperature and feed flow rate) and the important qualities (e.g conversion and weight average molecular weight (Mw)) in a continuous polymerization reactor. The subspace-based identification method for Wiener model is used to retrieve from the discrete sample data the accurate information about both the structure and initial parameter estimates for iterative parameter optimization methods. The comparison of the output of the identified Wiener model with the outputs of a non-linear plant model shows a fairly satisfactory degree of accordance.