Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator |
정귀상
(동서대학교 정보시스템공학부 메카트로닉스공학)
김재민 (동서대학교 정보시스템공학부 메카트로닉스공) 윤석진 (한국과학기술연구원 박막기술연구센터) |
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Micro-actuators and thier technologies
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DOI ScienceOn |
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DOI ScienceOn |
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MEMS micro-valve for space applications
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Electromagnetically driven microvalve fabricated in silicon
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A silicon mass flow control micro-system
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BioMEMS application in medicine
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MEMS용 MCA/Si diaphragm 구조의 변위해석
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파이렉스 #7740 유리박막을 이용한 MEMS용 MLCA와 Si기판의 양극접합 특성
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과학기술학회마을 DOI ScienceOn |