• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.381.2-381.2
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• 2014

In this study the amorphous carbon films were deposited by PECVD at the substrate temperature range of 250 to $600^{\circ}C$, and the process conditions of higher and lower precursor flow rate, respectively. The temperature was a main parameter to control the density and mirco-structures of carbon films, and their's properties depended with the process temperatrue are changed by controlling precursor flow rate. The precursor feeding rate affect on the plasma ion density and a deposition reactivity. This change of film properties was obtained the instrinsic stress, FT-IR & Raman analysis, refractive index (RI) and ext. coef. (k) measured by ellipsometer. In the process conditions of lower and higher flow rate of precursor it had a different intrinsic stress as a function of the substrate temperature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.164-167
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• 2003

Carbon nitride films with ${\beta}-C_3N_4$ crystals were grown by rf reactive magnetron sputtering system with negative DC bias. Chamber baking system to supply whole chamber with activation energy was used to reduce the contamination of H and O atoms. XRD peaks showed the existence of crystalline ${\beta}-C_3N_4$(200) and lonsdaleite structures. FTIR spectroscopy studies revealed that the film contain ${\alpha}-C_3N_4$ and ${\beta}-C_3N_4$ with $1011\;cm^{-1},\;1257\;cm^{-1}\;and\;1529\;cm^{-1}$ peaks. We could also find the grain growth of hexagonal structure from SEM photograph, which is coincident with the theoretical carbon nitride unit cell. ${\alpha}$-step was used to make the thickness profile of the grown films.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.310-310
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• 2011

Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences ($0^{\circ}{\sim}30^{\circ}$) atomically smooth surfaces are observed during their growth. However, rough surfaces emerge and develop into a ripple structure at grazing incidences ($60^{\circ}{\sim}70^{\circ}$). The different growth modes according to the incidence angles can be described by impact-induced displacements of atoms. Downhill transport along any sloped surfaces is predominant for the case of normal incidence. As the incidence angles become grazing, uphill transport is allowed along the surfaces, which have smaller slopes than incidence angle, so the surface features can be amplified. Impact-induced transport and self-shadowing effect can be responsible to the initial growth of seeding structures at a grazing incidence, which would be grown up as tilted columnar structures in further depositions.

• 센서학회지
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• 제13권3호
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• pp.182-187
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• 2004

The fluorinated amorphous carbon thin films (a-C:F) were deposited by PECVD(plasma enhanced chemical vapor deposition). The precursors were $C_{4}F_{8}$ which had a similar ratio of target film's carbon to fluorine ratio, and $Si_{2}H_{6}$/He for capturing excessive fluorine ion. We varied deposition condition of temperature and working pressure to survey the effect of each changes. We measured dielectric constant, composition, and etc. At low temperature the film adhesion to substrate was very poor although the growth rate was very high, the growth rate was very low at high temperature. The EDS(energy dispersive spectroscopy) result showed carbon and fluorine peak for films and Si peak for substrate. There was no oxygen peak.

• Transactions on Electrical and Electronic Materials
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• 제13권6호
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• Bulletin of the Korean Chemical Society
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• 제31권11호
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• pp.3259-3264
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• 2010

A label-free amperometric immunosensor has been proposed for the detection of myeloperoxidase (MPO) in human serum. To fabricate such an immunosensor, a composite film consisting of N,N-dimethylformamide (DMF), multiwall carbon nanotubes (MWCNTs) and 1-ethyl-3-methyl imidazolium tetrafluoroborate ($EMIMBF_4$) suspension was initially formed on a glassy carbon electrode (GCE). Then cerium dioxide ($CeO_2$) dispersed by chitosan was coated on the GCE. After that, MPO antibodies (anti-MPO) were attached onto the nano$CeO_2$ surface. With a noncompetitive immunoassay format, the antibody-antigen complex formed between the immobilized anti-MPO and MPO in sample solution. The immunosensor was characterized by cyclic voltammetry, transmission electron microscopy (TEM) and scanning electron microscopy (SEM). The factors influencing the performance of the immunosensor were studied in detail. Under optimal conditions, the current change before and after the immunoreaction was proportional to MPO concentration in the range of 5 to $300\;ng\;mL^{-1}$ with a detection limit of $0.2\;ng\;mL^{-1}$.

• Bulletin of the Korean Chemical Society
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• 제27권11호
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• pp.1854-1860
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• 2006

Electrochemical behaviors of acetaminophen at a muti-wall carbon nano-tube composite film modified glassy carbon electrode were investigated by cyclic voltammetry, linear sweep voltammetry and chronocoulometry. Compared with that obtained at the unmodified electrode, the peak currents were enhanced significantly, and the oxidation peak shifted towards more negative potential with the reduction peak shifted positively. The peak-to-peak separation turned narrow, and suggested that the reversibility was improved greatly. Experimental parameters, such as scan rate, pH and accumulation conditions were optimized. It was found that a maximum current response can be obtained at pH = 5.0 after accumulation at -0.50 V for 80 s. The oxidation peak current was found to be linearly related to acetaminophen concentration over the range of $5.0{\times}10^{-7}\;\sim\;1.0{\times}10^{-4}$ mol $L^{-1}$ with a detection limit of $5.0{\times}10^{-8} $mol $L^{-1}$. A convenient and sensitive electrochemical method was developed for the determination of acetaminophen in a commercial paracetamol oral solution. Its practical application demonstrated that it has good selectivity and high sensitivity.

• 한국전기전자재료학회논문지
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• 제31권4호
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• pp.238-243
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• 2018

A nanofiber was fabricated with carbon nanotubes for transparent electrodes. It was prepared with a composite solution of bio-molecules polycaprolactone (PCL) and multiwalled carbon nanotubes (MWCNTs) by electrospinning on a glass substrate, following which its electrical characteristics were investigated. The content of MWCNTs was varied during electrospinning, while that of PCL was fixed. Further, a nanometer-thick thin film of silver was deposited on the nanofiber layer using a thermal evaporator to improve the electrical characteristics; the sheet resistance significantly reduced after this deposition. The results showed that this carbon nanotube nanofiber has potential applications in biotechnology and as a flexible transparent display material.

• 한국전기전자재료학회논문지
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• 제31권1호
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• pp.40-43
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• 2018

Various Ni-doped carbon (C : Ni) thin films were fabricated using different Ni target power densities by unbalanced magnetron sputtering (UBM). The effects of target power density on the structural, physical, surface, and electrical properties of C : Ni films were investigated. The UBM C : Ni thin films exhibited uniformly smooth surfaces. The rms surface roughness and friction coefficient values of the C : Ni films decreased with the increase in target power density. The physical properties of the films such as hardness and elastic moduli increased while their electrical properties such as resistivity decreased with the increase in the target power density. These results show that an increase of the power density leads to an increase in the proportion of Ni and nanocrystallization of the amorphous carbon film; this contributes to the changes observed in the physical and electrical characteristics.

• 한국분말재료학회지
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• 제29권4호
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• pp.297-302
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• 2022

This study compares the characteristics of a compact TiO₂ (c-TiO₂) powdery film, which is used as the electron transport layer (ETL) of perovskite solar cells, based on the manufacturing method. Additionally, its efficiency is measured by applying it to a carbon electrode solar cell. Spin-coating and spray methods are compared, and spray-based c-TiO₂ exhibits superior optical properties. Furthermore, surface analysis by scanning electron microscopy (SEM) and atomic force microscopy (AFM) exhibits the excellent surface properties of spray-based TiO₂. The photoelectric conversion efficiency (PCE) is 14.31% when applied to planar perovskite solar cells based on metal electrodes. Finally, carbon nanotube (CNT) film electrode-based solar cells exhibits a 76% PCE compared with that of metal electrode-based solar cells, providing the possibility of commercialization.