Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07a
- /
- Pages.164-167
- /
- 2003
Crystalline Analysis of Carbon Nitride Films Deposited by Reactive Sputtering System
반응성 스퍼터링 장치로 제작된 질화탄소막의 결정성 분석
- Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
- Ha, Se-Geun (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
- Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam Univ.)
- Published : 2003.07.10
Abstract
Carbon nitride films with