Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
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- Pages.310-310
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- 2011
Molecular dynamics study on initial growth behavior of amorphous carbon film under various incidence angles
- Joe, Min-Woong (Computational Science Center, Korea Institute of Science and Technology) ;
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Moon, Myoung-Woon
(Computational Science Center, Korea Institute of Science and Technology) ;
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Lee, Kwang-Ryeol
(Computational Science Center, Korea Institute of Science and Technology)
- Published : 2011.02.09
Abstract
Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences (