• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.177-178
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• 2009

DLC (Diamond-like Carbon) 코팅막은 저마찰, 고경도, 낮은 표면조도 등의 우수한 특성을 갖는 박막 물질로 다양한 산업분야에서 그 코팅막의 활용을 목적으로 응용연구가 활발하게 이루어지고 있다. 본 연구에서는 플라즈마 화학기상증착(PCVD) 공정을 이용하여 바이어스, 진공도, 공정 온도 등의 코팅 조건 변수를 이용하여 DLC 코팅막을 제작하였다. 또한, 코팅막은 공정 조건에 따라 증착속도, 표면 및 단면 조직, 밀착력, 경도, 마찰계수 등의 특성을 평가하였다. 플라즈마 화학기상증착법을 이용한 DLC 코팅막 제조는 상온과 $175^{\circ}C$에서 이루어졌으며, 저온 중 DLC 코팅막 제조가 가능해짐에 따라 고분자 와 같은 저융점을 갖는 피처리물의 코팅처리가 가능하여 산업적 응용의 확대가 기대된다. SEM 표면 조직 관찰에 따른 DLC 코팅막의 표면조직과 조도는 공정조건에 따라 큰 차이는 보이지 않았지만, 밀착력에 있어서는 매우 큰 차이를 나타내었다. 스크래치 시험 결과 가장 높은 밀착력은 100 N 이상을 나타내었으며, 이 때의 마찰계수는 약 0.02를 나타내었다. 가장 낮은 마찰계수는 약 0.01을 보였으며, 이때의 밀착력은 25 N을 나타내었다. 증착속도는 바이어스 전압의 증가에 따라 증가하는 경향을 나타내었으며, 온도의 증가에 따라 감소하는 경향을 나타내었다.

• Journal of the Korean Applied Science and Technology
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• v.27 no.3
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• pp.361-369
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• 2010

A study on the corrosion inhibition of metals is important in many industrial applications (carbon steel, copper, aluminum, SUS 304, nickel). In this study, we investigated the C-V diagrams related to the surface corrosion of metals. It was observed through the SEM that the surface corrosion state of the various metals had the corrosion potential by the scan rate and the organic inhibitor containing an amine group. We determined to measure cyclic voltammetry using the three-electrode system. The measurement of oxidation and reduction ranged from -1350mV to 1650mV. The scan rate was 50, 100, 150, and 200mV/s. It turned out that the C-V characterization of SUS 304 was irreversible process caused by the oxidation current from the cyclic voltammogram. After adding organic inhibitors, the adsorption film was constituted, and the passive phenomena happened. As a result, it was revealed that the inhibition effect of metal corrosion depends on the molecular interaction, and the interaction has influence on the adsorption complex.

• Bulletin of the Korean Chemical Society
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• v.15 no.1
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• pp.79-83
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• 1994

The organometallic chemical vapor deposition of single precursors, $[Me_2Al({\mu}-NHR)]_2\;(R=^iPr,\;^tBu)$, for alumininum nitride thin films has been investigated to evaluate their poroperties as potential precursors. In chemical vapor deposition processes the gas phase products scattered from a Ni(100) substrate were analyzed by mass spectrometry and the deposited films were characterized by X-ray photoelectron spectroscopy (XPS). The optimum temperatures for the formation of AlN films have been found to be between 700 K and 800 K. Carbon contamination of the films seems to be attributed mainly to the methyl groups bonded to the aluminum atoms. It is apparent that $^tBu$ group is better than $^iPr$ group as a substituent on the nitrogen atom of the single precursors for the AlN thin film formation.

• Korean Journal of Metals and Materials
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• v.48 no.12
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• pp.1109-1115
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• 2010

ZnO thin films were deposited on Si(100) substrates at low temperatures ($44^{\circ}C{\sim}210^{\circ}C$) by atomic layer deposition using DEZn (diethyl zinc) and water as precursors. The film thickness was measured by ellipsometry calibrated with cross-sectional TEM. The phase formation, microstructure evolution, UV-absorbance, and chemical composition changes were examined by XRD, SEM, AFM, TEM, UV-VIS-NIR, and AES, respectively. A uniform amorphous ZnO layer was formed even at $44^{\circ}C$ while stable crystallized ZnO films were deposited above $90^{\circ}C$. All the samples showed uniform surface roughness below 3 nm. Fully crystallized ZnO layers with a band-gap of 3.37 eV without carbon impurities can be formed at substrate temperatures of less than $90^{\circ}C$.

• Korean Journal of Metals and Materials
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• v.50 no.7
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• pp.545-548
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• 2012

The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RF-plasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of $2.79{\Omega}/{\Box}$. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.

• Korean Journal of Optics and Photonics
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• v.22 no.3
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• pp.117-121
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• 2011

We propose a saturable absorber reflector based on guided-mode resonance. A carbon nanotube is used as a saturable absorber. By tuning the fill factor, modulation depth can be increased without a change of height of the CNT. We investigate the reflector properties such as modulation depth, bandwidth and peak reflectance as a function of the height of the CNT and the fill factor. The advantage of the proposed reflector is that it can reduce saturation energy by 50 times compared with CNT thin film of 100~200nm.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.44-47
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• 2019

Amorphous carbon layer (ACL) is actively used as an etch mask. Recent advances in patterning ACL requires the next level of durability of hard mask in high aspect ratio etch in near future semiconductor manufacturing, and it is worthwhile to know the surface property of ACL thin film to enhance the property of etch hard mask. In this research, ACL are deposited by 6 inch plasma enhanced chemical vapor deposition system with $C_3H_6$ and $N_2$ gas mixture. Surface properties of deposited ACL are investigated depending on gas flow, pressure, RF power. Fourier transform infrared is used for the analysis of surface chemistry, and X-ray photoemission spectra is used for the structural analysis with the consideration of the contents of $sp^2$ and $sp^3$ through fitting of C1s. Also mechanical properties of deposited ACL are measured in order to evaluate hardness.

• Corrosion Science and Technology
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• v.19 no.6
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• pp.326-336
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• 2020

Galvalume steel (GL) is widely used in marine and industrial environments. It is characterized by better corrosion resistance than carbon steel. However, corrosion and economic losses may occur as the usage time is increased. Therefore, in this study, an outdoor exposure test of GL for 36 months was conducted across six regions of Korea. Parameters such as corrosion rate, chrominance (color, chroma, and brightness), glossiness, and surface appearance were analyzed. The results showed no significant change in appearance, and the initial corrosion rate was large, but a tendency to decrease with time was observed. Increased outdoor exposure time led to increase in the level of corrosion products. In the case of coastal areas where S, Cl, and other elements were detected, a relatively high decrease in Zn content was observed. Al forms a protective oxide film and exists in the coating layer, but Zn dissolves due to its chemical activity and low potential.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.21-29
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• 2021

Recently, semiconductor chips and electronic components are increasingly being used in IT devices such as wearable watches, autonomous vehicles, and smart phones. As a result, there is a growing concern about device malfunctions that may occur due to electromagnetic interference being entangled with each other. In particular, electromagnetic wave emissions from wearable or flexible smart devices have detrimental effects on human health. Therefore, flexible and transparent electromagnetic interference (EMI) shielding materials and films with high optical transmittance and outstanding shielding effectiveness have been gaining more attention. The EMI shielding films for flexible and transparent electronic devices must exhibit high shielding effectiveness, high optical transmittance, high flexibility, ultrathin and excellent durability. Meanwhile, in order to prepare this EMI shielding films, many materials have been developed, and results regarding excellent EMI shielding performance of a new materials such as carbon nano tube (CNT), graphene, Ag nano wire and MXene have recently been reported. Thus, in this paper, we review the latest research results to EMI shielding films for flexible and transparent device using the new materials.

• Tribology and Lubricants
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• v.38 no.6
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• pp.227-234
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• 2022

Recently, the demand for improving energy efficiency has rapidly increased because of the growing concerns over environmental issues. In this work, the tribo-test and simulation for the initial wear and lubrication performance were performed for the piston pin in the small end system of the connecting rod of a marine engine, to obtain useful data for improving the efficiency of marine engine systems. In addition, a diamond-like carbon (DLC) coating was applied to the piston pin to explore feasibility of eliminating the bush used in the system. The initial wear and lubrication characteristics between the uncoated piston pin and bush were compared with that between the DLC-coated piston pin and connecting rod in the tribo-test. The simulation for the wear and lubrication performance according to the wear progression was conducted based on the data obtained from the test. The wear characteristics were quantitatively assessed by the wear depth and wear volume, and the lubrication performance was characterized with the change of pressure and minimum oil film thickness with respect to the crank angle. It was found that the DLC-coated piston pin may provide better initial wear characteristics and lubrication performance. The results of this work may provide fundamental information for marine engines with improved efficiency.