• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2230-2232
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• 2000

This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

• Journal of Sensor Science and Technology
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• v.15 no.3
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• pp.164-167
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• 2006

Calorimeter is one of widely used biosensors. Conventional or existing calorimeters are realized directly on a silicon wafer which has very high thermal conductivity. It results in decreasing temperature difference between junctions and it makes a sensitivity of calorimeter to be decreased. In this study, the microcalorimeter was made by using MEMS(Micro Electro Mechanical Systems)-technology and hot junctions of the microcalorimeter are released from a silicon substrate to reduce loss of generated heat by reactions between biomolecules. Sensitivity of the released microcalorimeter was 18 mV/M which is 1.5 times higher than another calorimeters on silicon substrate by reactions between biotin and streptavidin.

• Journal of Sensor Science and Technology
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• v.19 no.1
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• pp.31-35
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• 2010

High temperature micro pressure sensors were fabricated by using polycrystalline 3C-SiC piezoresistors grown on oxidized SOI substrates by APCVD. These have been made by bulk micromachining under $1{\times}1mm^2$ diaphragm and Si membrane thickness of $20{\mu}m$. The pressure sensitivity of implemented pressure sensors was 0.1 mV/$V{\cdot}bar$. The nonlinearity and the hysteresis of sensors were ${\pm}0.44%{\cdot}FS$ and $0.61%{\cdot}FS$. In the temperature range of $25^{\circ}C{\sim}400^{\circ}C$ with 5 bar FS, TCS (temperature coefficient of sensitivity), TCR (temperature coefficient of resistance), and TCGF (temperature coefficient of gauge factor) of the sensor were -1867 ppm/$^{\circ}C$, -792 ppm/$^{\circ}C$, and -1042 ppm/$^{\circ}C$, respectively.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.1
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• pp.24-30
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• 2011

PC-TEMs (Polycarbonate Track-Etched membranes) were micro-drilled for biomedical applications by ultrafast pulsed laser. The ablation and damage characteristics were studied on PE-TEMs by assuming porous thin membranes. The experiments were conducted in the range of 2.02 $J/cm^2$ and 8.07$J/cm^2$. The ablation threshold and damage threshold were found to be 2.56$J/cm^2$ and 1.14$J/cm^2$, respectively. While a conical shaped drilled holes was made in lower fluence region, straight shaped holes were drilled in higher fluence region. Nanoholes made the membrane as porous material and ablation characteristics for both bulk and thin film membranes were compared.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.1
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• pp.138-143
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• 2010

This paper presents the analysis, the fabrication and the test results of a micro passive gas pressure regulator to keep the outlet pressure costant even for a widely-varying inlet pressure. This device is to regulate the outlet pressure according to the applied reference pressure based on the pressure balancing mechanism of the structure including a membrane and a valve. This regulator consists of four layers; a bulk-micromachined silicon substrate, a sandblasted glass substrate, a PDMS valve seat layer and a glass valve layer. The device size is $10\times13\times1.7 mm3$. The device was fabricated by micromachining. The characteristic of the device was analyzed and tested. The characteristic of the fabricated pressure regulator is similar to that obtained from the analysis. The pressure regulator of this paper is feasible for portable systems and miniature drug delivery systems.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.74-74
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• 2003

적외선 감지기는 냉장고, 에어컨, 자동차용 전자부품 등의 온도측정 및 제어, 과잉 전류의 억제를 위한 소자로 널리 사용되며, 또한 최근에는 온도보상형 수정발진기(TCXO) 또는 RF모듈, 액정 판넬의 온도보상회로 등 정보통신기기의 신뢰성 향상을 위해 그 수요가 날로 증가하고 있다. 현재 상용되는 적외선 감지기의 대부분은 벌크형 또는 후막형으로 제조되고 있으나, 최근 반도체공정 기술의 발달로 인하여 보다 향상된 특성이 요구됨에 따라 박막형 등 새로운 형태의 적외선 감지기 대해 활발한 연구가 이루어지고 있다. 본 연구에서는 열 질량과 전도에 의한 열손실을 최소화하여 소자의 감도 및 응답 특성을 향상시키기 위하여 SiO$_2$Si$_3$N$_4$/SiO$_2$ (ONO)다중층 위에 소자 감지부를 형성하고 bulk-micromachining기술을 이용하여 멤브레인 구조를 갖는 박막형 적외선 감지기를 제작하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.741-744
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• 2001

This paper described on the fabrication of microstructures by DRIE(Deep Reactive Ion Etching). SOI(Si-on-insulator) electric devices with buried cavities are fabricated by SDB technology and electrochemical etch-stop. The cavity was fabricated the upper handling wafer by Si anisotropic etch technique. SDB process was performed to seal the fabricated cavity under vacuum condition at -760 mm Hg. In the SDB process, captured air and moisture inside of the cavities were removed by making channels towards outside. After annealing(1000$^{\circ}C$, 60 min.), the SDB SOI structure was thinned by electrochemical etch-stop. Finally, it was fabricated microstructures by DRIE as well as a accurate thickness control and a good flatness.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.465-469
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• 1999

In this paper, spacer process for FED (Field Emission Display ) was developed with the glass to glass anodic bonding technology using Al film as an interlayer. Characteristics, current density-time curves and force of the anodic boding were measured on various thickness of Al film; 1000$\AA$, 2000$\AA$, 3000$\AA$, 4000$\AA$ and 500$\AA$. Holders for spacer were fabricated with photosensitive glass and (110) Si wafer by bulk micromachining. Spacers was formed on glass substrate by spacer glass to glass anodic bonding and an evacuated panel was fabricated to prove the potential of application for FED.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1890-1892
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• 2001

This paper described on the fabrication of microstructures by DRIE(Deep Reactive Ion Etching). SOI(Si-on-insulator) electric devices with buried cavities are fabricated by SDB technology and electrochemical etch-stop. The cavity was fabricated the upper handling wafer by Si anisotropic etch technique. SDB process was performed to seal the fabricated cavity under vacuum condition at -750 mm Hg. In the SDB process, captured air and moisture inside of the cavities were removed by making channels towards outside. After annealing(1000$^{\circ}C$, 60 min.), the SDB SOI structure was thinned by electrochemical etch-stop. Finally, it was fabricated microstructures by DRIE as well as a accurate thickness control and a good flatness.