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http://dx.doi.org/10.5370/KIEE.2010.59.1.138

A Micro Passive Gas Pressure Regulator using Pressure Balance Mechanism  

Lee, Ki-Jung (아주대학교 전자공학과)
Yang, Sang-Sik (아주대학교 전자공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.59, no.1, 2010 , pp. 138-143 More about this Journal
Abstract
This paper presents the analysis, the fabrication and the test results of a micro passive gas pressure regulator to keep the outlet pressure costant even for a widely-varying inlet pressure. This device is to regulate the outlet pressure according to the applied reference pressure based on the pressure balancing mechanism of the structure including a membrane and a valve. This regulator consists of four layers; a bulk-micromachined silicon substrate, a sandblasted glass substrate, a PDMS valve seat layer and a glass valve layer. The device size is $10\times13\times1.7 mm3$. The device was fabricated by micromachining. The characteristic of the device was analyzed and tested. The characteristic of the fabricated pressure regulator is similar to that obtained from the analysis. The pressure regulator of this paper is feasible for portable systems and miniature drug delivery systems.
Keywords
Passive; Ppressure regulator; Pressure balancing mechanism; Membrane;
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