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http://dx.doi.org/10.5369/JSST.2006.15.3.164

Design and fabrication of a highly sensitive microcalorimetric biosensor by bulk micromachining  

Yoon, S.I. (School of Mechanical Engineering, Yonsei University)
Kim, J.H. (School of Mechanical Engineering, Yonsei University)
Kwak, B.S. (School of Mechanical Engineering, Yonsei University)
Kim, Y.J. (School of Mechanical Engineering, Yonsei University)
Jung, H.I. (School of Mechanical Engineering, Yonsei University)
Publication Information
Journal of Sensor Science and Technology / v.15, no.3, 2006 , pp. 164-167 More about this Journal
Abstract
Calorimeter is one of widely used biosensors. Conventional or existing calorimeters are realized directly on a silicon wafer which has very high thermal conductivity. It results in decreasing temperature difference between junctions and it makes a sensitivity of calorimeter to be decreased. In this study, the microcalorimeter was made by using MEMS(Micro Electro Mechanical Systems)-technology and hot junctions of the microcalorimeter are released from a silicon substrate to reduce loss of generated heat by reactions between biomolecules. Sensitivity of the released microcalorimeter was 18 mV/M which is 1.5 times higher than another calorimeters on silicon substrate by reactions between biotin and streptavidin.
Keywords
calorimeter; releasing; MEMS(Micro Electro Mechanical Systems);
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