대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

표면 및 몸체 미세 가공 기술로 제작된 대기압에서 동작하는 전자력 검출형 각속도계의 연구

A Surface-Bulk Micromachined Electromagnetic Gyroscope Operating at Atmospheric Pressure

  • 김성혁 (서울대학교 전기.컴퓨터 공학부) ;
  • 김용권 (서울대학교 전기.컴퓨터 공학부) ;
  • 송진우 (서울대학교 전기.컴퓨터 공학부) ;
  • 이장규 (서울대학교 전기.컴퓨터 공학부)
  • Kim, Seong-Hyok (School of Electrical and Computer Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical and Computer Engineering, Seoul National University) ;
  • Song, Jin-Woo (School of Electrical and Computer Engineering, Seoul National University) ;
  • Lee, Jang-Gyu (School of Electrical and Computer Engineering, Seoul National University)
  • 발행 : 2000.07.17
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초록

This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

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