• Title/Summary/Keyword: AlGaN

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누설전류를 줄이기 위한 원형 AlGaN/GaN 쇼트키 장벽 다이오드

  • Kim, Min-Gi;Im, Ji-Yong;Choe, Yeong-Hwan;Kim, Yeong-Sil;Seok, O-Gyun;Han, Min-Gu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.21-22
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    • 2009
  • We proposed circular AlGaN/GaN schottky barrier diode, which has no mesa structure near the current path. Proposed device showed low leakage current of 10 nA/mm at -100 V while that of the rectangular device was 34 nA/mm at the same condition. Proposed circular AlGaN/GaN SBD showed high forward current of 88.61 mA at 3.5 V while that of the conventional device was 14.1 mA at the same condition.

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Formation Mechanism of a Large Schottky Barrier Height for Cr-AlGaN/GaN Heterostructure (Cr/n-AlGaN/GaN Schottky Contact에서 높은 쇼트키 장벽 형성 메카니즘에 관한 연구)

  • Nam, Hyo-Duk;Lee, Yeung-Min;Jang, Ja-Soon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.4
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    • pp.266-270
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    • 2011
  • We report on the formation mechanism of large Schottky barrier height (SBH) of nonalloyed Cr Schottky contacts on strained Al0.25Ga0.75N/GaN. Based on the current-voltage (I-V) and capacitance-voltage (C-V) data, the SBHs are determined to be 1.98 (${\pm}0.02$) and 2.07 (${\pm}0.02$) eV from the thermionic field emission and two-dimensional electron gas (2DEG) calculations, respectively. Possible formation mechanism of large SBH will be described in terms of the formation of Cr-O chemical bonding at the interface between Cr and AlGaN/GaN, low binding-energy shift to surface Fermi level, and the reduction of 2DEG electrons.

Growth of InGaN/AlGaN heterostructure by mixed-source HVPE with multi-sliding boat system (Multi-sliding boat 방식을 이용한 혼합소스 HVPE에 의한 InGaN/AlGaN 이종 접합구조의 성장)

  • Jang, K.S.;Kim, K.H.;Hwang, S.L.;Jeon, H.S.;Choi, W.J.;Yang, M.;Ahn, H.S.;Kim, S.W.;Yoo, J.;Lee, S.M.;Koike, M.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.4
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    • pp.162-165
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    • 2006
  • The selective growth of InCaN/AlGaN light emitting diodes was performed by mixed-source hydride vapor phase epitaxy (HVPE). In order to grow the InGaN/AlGaN heterosturcture consecutively, a special designed multi-sliding boat was employed in our mixed-source HVPE system. Room temperature electroluminescence spectum of the SAG-InGaN/AlGaN LED shows an emission peak wavelength of 425 nm at injection current 20 mA. We suggest that the mixed-source HVPE method with multi-sliding boat system is possible to be one of the growth methods of III-nitrides LEDs.

AlGaN/GaN-on-Si Power FET with Mo/Au Gate

  • Kim, Hyun-Seop;Jang, Won-Ho;Han, Sang-Woo;Kim, Hyungtak;Cho, Chun-Hyung;Oh, Jungwoo;Cha, Ho-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.17 no.2
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    • pp.204-209
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    • 2017
  • We have investigated a Mo/Au gate scheme for use in AlGaN/GaN-on-Si HFETs. AlGaN/GaN-on-Si HFETs were fabricated with Ni/Au or Mo/Au gates and their electrical characteristics were compared after thermal stress tests. While insignificant difference was observed in DC characteristics, the Mo/Au gate device exhibited lower on-resistance with superior pulsed characteristics in comparison with the Ni/Au gate device.

Optically Pumped Stimulated Emission from AlGaN/GaN Double-Heterostructure (AlGaN/GaN이중 이종접합구조의 광여기 유도방출 특성)

  • Kim, Seon-Tae;Mun, Dong-Chan
    • Korean Journal of Materials Research
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    • v.5 no.4
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    • pp.445-450
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    • 1995
  • AIN 완충층을 이용하여 대기압 유기금속에피텍셜 (MOVPE)법으로 사파이어 기판위에 성장시킨 AlGaN/GaN 이중 이종접합구조(double heterostructure : DH)의 고밀도 광여기에 의한 자외선 영역에서의 단면모드 유도방출 특성에 대하여 조사하였다. 실온에서 여기광 밀도 200kW/$cm^{2}$에서 방출된 AlGaN/GaN DH의 유도방출 피크파장과 반치폭은 각각 369nm와 22.4meV이었으며, 80K의 온도에서는 각각 360.1nm와 13.4meV이었다. 고밀도 광여기에 의하여 단면모드 자외영역 유도방출을 얻기에 필요한 입사광 밀도의 임계치는 실온과 80K의 온도에서 각각 89kW/$cm^{2}$와 44kW/$cm^{2}$이었다.

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Effective Channel Mobility of AlGaN/GaN-on-Si Recessed-MOS-HFETs

  • Kim, Hyun-Seop;Heo, Seoweon;Cha, Ho-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.6
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    • pp.867-872
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    • 2016
  • We have investigated the channel mobility of AlGaN/GaN-on-Si recessed-metal-oxide-semiconductor-heterojunction field-effect transistors (recessed-MOS-HFET) with $SiO_2$ gate oxide. Both field-effect mobility and effective mobility for the recessed-MOS channel region were extracted as a function of the effective transverse electric field. The maximum field effect mobility was $380cm^2/V{\cdot}s$ near the threshold voltage. The effective channel mobility at the on-state bias condition was $115cm^2/V{\cdot}s$ at which the effective transverse electric field was 340 kV/cm. The influence of the recessed-MOS region on the overall channel mobility of AlGaN/GaN recessed-MOS-HFETs was also investigated.

A TEM Study on Growth Characteristics of GaN on Si(111) Substrate using MOCVD (Si(111) 기판 위에 MOCVD 법으로 성장시킨 GaN의 성장 특성에 관한 TEM 분석)

  • 신희연;정성훈;유지범;서수정;양철웅
    • Journal of the Korean institute of surface engineering
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    • v.36 no.2
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    • pp.135-140
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    • 2003
  • The difference in lattice parameter and thermal expansion coefficient between GaN and Si which results in many defects into the grown GaN is larger than that between GaN and sapphire. In order to obtain high quality GaN films on Si substrate, it is essential to understand growth characteristics of GaN. In this study, GaN layers were grown on Si(111) substrates by MOCVD at three different GaN growth temperatures ($900^{\circ}C$, $1,000^{\circ}C$ and $1,100^{\circ}C$), using AlN and LT-GaN buffer layers. Using TEM, we carried out the comparative investigation of growth characteristics of GaN by characterizing lattice coherency, crystallinity, orientation relationship and defects formed (transition region, stacking fault, dislocation, etc). The localized region with high defect density was formed due to the lattice mismatch between AlN buffer layer and GaN. As the growth temperature of GaN increases, the defect density and surface roughness of GaN are decreased. In the case of GaN grown at $1,100^{\circ}$, growth thickness is decreased, and columns with out-plane misorientation are formed.

Characterization of GaN on GaN LED by HVPE method

  • Jung, Se-Gyo;Jeon, Hunsoo;Lee, Gang Seok;Bae, Seon Min;Kim, Kyoung Hwa;Yi, Sam Nyung;Yang, Min;Ahn, Hyung Soo;Yu, Young Moon;Kim, Suck-Whan;Cheon, Seong Hak;Ha, Hong Ju;Sawaki, Nobuhiko
    • Journal of Ceramic Processing Research
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    • v.13 no.spc1
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    • pp.128-131
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    • 2012
  • The selective area growth light emitting diode on GaN substrate was grown using mixed-source HVPE method with multi-sliding boat system. The GaN substrate was grown using mixed-source HVPE system. Te-doped AlGaN/AlGaN/Mg-doped AlGaN/Mg-doped GaN multi-layers were grown on the GaN substrate. The appearance of epi-layers and the thickness of the DH was evaluated by SEM measurement. The DH metallization was performed by e-beam evaporator. n-type metal and p-type metal were evaporated Ti/Al and Ni/Au, respectively. At the I-V measurement, the turn-on voltage is 3 V and the differential resistance is 13 Ω. It was found that the SAG-LED grown on GaN substrate using mixed-source HVPE method with multi-sliding boat system could be applied for developing high quality LEDs.

Poperties of Optically Pumped Stimulated Emission and its Polarization from an AlGaN/GaInN Double Heterostructure (AlGaN/GaInN 이중 이종접합구조의 광여기 유도방출과 편광특성)

  • Kim, Seon-Tae;Mun, Dong-Chan
    • Korean Journal of Materials Research
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    • v.5 no.4
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    • pp.420-425
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    • 1995
  • AlGaN/GaInN 이중이종접합구조(double heterostructure :DH)를 대기압 유기금속기상에 피텍셜(MOVPE)법으로 AIN 와충층을 이용하여 사파이어 기판위에 성장하고, 실온에서의 광여기법에 의한 청색영역의 단면모드 유도방출특성과 편광특성을 조사하였다. 여기광원의 광밀도가 증가함에 따라 청색 영역에서의 유도방출 피크는 낮은 에너지 쪽으로 이동하였고, 유도방출 피크파장은 여기광밀도가 200kW/$cm^{2}$일때 402nm 이었으며, 스펙트럼의 반치폭은 18meV 이었다. 또한 유도방출에 필요한 여기광밀도의 임계치는 130 kW/$cm^{2}$ 이었다. AlGaN/GaInN로부터 방출되는 유도방출 광은 임계치 이상에서 TE-mode로 편광 되었다.

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