• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2012.04a
• /
• pp.324-329
• /
• 2012

Isolation tables are widely used for precision equipments and their isolation performances have been usually expressed and evaluated by transsmissibility. However, transmissibility is a concept for 1-degree of freedom(DOF) system. In practice, isolation tables are supproted by more than 4 springs. Each spring is subjected to vertical and horizontal ground vibrations, and also the table has more than 1-DOF. Therefore, isolation tables should be treated as multi-input/multi-output(MIMO) system of which isolation performance is expressed by transmissibility matrix. However, the matrix is too complicated to be an index for a system. In this paper, maximum singular value of transmissibility matrx is suggested as a simple performance index of a MIMO isolation system. Physical meaning of singular value is explained using a simple a 2-DOF isolation table. Furthermore, maximum singular values of passive, 3-DOF active and 6-DOF active isolation tables are obtained through experiments, and their meaning are explained and compared with each other.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.33 no.11
• /
• pp.1347-1352
• /
• 2009

Magnetic force driven six degree-of-freedom active vibration isolation system is developed. The velocity sensor using an electromagnetic principle that is commonly used in the vibration control is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. A lag-type compensator is adopted to reduce the phase lead and the stability test is performed by using a Bode analysis. The performance of the AVIS is validated by comparing with the passive isolation system by using the frequency responses.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2007.05a
• /
• pp.185-190
• /
• 2007

In recent days, vibration isolation system is mostly required in precise measurement and manufacturing system to reduce vibration due to external disturbances and internal actuators. Among all the vibration isolation systems, air spring is widely used because of its low resonant frequency and high damping ratio. In this study, we first analyze the passive air-spring system using leveling valve, and then design the active vibration isolation system. Because the non-linearity of pneumatic characteristics, we try to design the fuzzy controller which is better than PID controller at complex and non-linear system, and then compare them both in experiment and simulation.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.20 no.10
• /
• pp.3079-3094
• /
• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• Journal of KSNVE
• /
• v.2 no.4
• /
• pp.281-292
• /
• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.309-310
• /
• 2008

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2007.11a
• /
• pp.731-736
• /
• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation system, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, Takagi-Sugeno fuzzy method is used to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.20 no.7
• /
• pp.637-643
• /
• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.3 s.192
• /
• pp.124-133
• /
• 2007

Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.

• Earthquakes and Structures
• /
• v.22 no.1
• /
• pp.53-64
• /
• 2022

This study proposes an intelligent semi-active isolation system combining a variable-stiffness control device and ground motion characteristic prediction. To determine the optimal control parameter in real-time, a genetic algorithm (GA)-fuzzy control law was developed in this study. Data on various types of ground motions were collected, and the ground motion characteristics were quantified to derive a near-fault (NF) characteristic ratio by employing an on-site earthquake early warning system. On the basis of the peak ground acceleration (PGA) and the derived NF ratio, a fuzzy inference system (FIS) was developed. The control parameters were optimized using a GA. To support continuity under near-fault and far-field ground motions, the optimal control parameter was linked with the predicted PGA and NF ratio through the FIS. The GA-fuzzy law was then compared with other control laws to verify its effectiveness. The results revealed that the GA-fuzzy control law could reliably predict different ground motion characteristics for real-time control because of the high sensitivity of its control parameter to the ground motion characteristics. Even under near-fault and far-field ground motions, the GA-fuzzy control law outperformed the FPEEA control law in terms of controlling the isolation layer displacement and the superstructure acceleration.