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Park, K., Choi, D., Ozer, A., Kim, S., Lee, Y. and Joo, D., 2008, 'A Voice Coil Actuator Driven Active Vibration Isolation System Mwithe the Consideration of Flexible Mods,' Rev. Sci. Instrum., Vol. 79, No. 6, 065106
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Park, S. I. and Quate, C. F., 1987, 'Theories of the Feedback and Vibration Isolation Systems for the Scanning Tunneling Microscope,' Rev. Sci. Instrum., Vol. 58, No. 11, pp. 2004-2009
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Jongkyu Jung, Woosub Youm and Kiyhwan Park, '3-D Nano Topology Measurement using VCM,' 2007 KSME Spring Annual Meeting, pp. 2223-2227
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Kyu Yong Kim, Hyun Seok Yang and Young Pil Park, 1996, 'Active Control of Isolation Table Using Hoo Control,' Trans. of the KSME A, Vol. 20, No. 10, pp. 3079-3094
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www.em4sys.com
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