Browse > Article

Design and Modeling of a 3-DOF Precision Stage for Vibration Isolation  

Moon, Jun-Hee (서울대학교 기계항공공학부 마이크로열시스템연구센터)
Kim, Hwa-Soo (서울대학교 기계항공공학부 BK21 사업단)
Pahk, Heui-Jae (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.3, 2007 , pp. 124-133 More about this Journal
Abstract
Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.
Keywords
Precision stage; Vibration isolation; Modeling; System identification;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Bae, H. S., 'Active Vibration Isolation and alignment issues for LIGO,' Master's thesis, Stanford University, 1990
2 Heiland, K., 'Recent Advancements in Passive and Active Vibration Control Systems,' Vibration Control in Microelectronics, Optics and Metrology, SPIE, Vol.1619, pp.22-33, 1991
3 Lee, D. S., Park, J. H. and Pahk, H. J., 'Ultra Precision Positioning System for Servo Motor - Piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation,' J. of KSPE, Vol.16, No.3, pp.154-163, 1999
4 Paros, J. M. and Weisbord, L., 'How to Design Flexure Hinges,' Machine Design, Vol.37, pp.151­156,1965
5 Lee, E. S. and Youm, Y. I., 'A Study on the Design of Nano-Laboratory for the Control of Environmental Parameters,' Proc. of KSPE Autumn Conference, pp.231-236, 1994
6 Doebelin, E., 'Measurement Systems : Application and Design, 4th Ed.,' McGraw-Hill, pp.321, 1990
7 Adams, V. and Askenazi, A., 'Building Better Products with Finite Element Analysis,' OnWord Press, 1999
8 Anderson, E. A. and Houghton, B., 'Elite-3 Active Vibration Isolation Workstation,' Proc. SPIE Conference on Smart Structures and Materials, pp.183-196, 2001
9 Bai, M. R. and Liu, w., 'Control design of active vibration isolatoin using -synthesis,' J. of Sound and Vibration, Vol.257, No.1, pp.157-175, 2002   DOI   ScienceOn
10 Zuo, L. and Nayfeh, S. A., 'An Integral Sliding Control for Robust Vibration Isolation and its Implementation,' SPIE's 11th Annual International Symposium on Smart Structures and Materials, 2004