• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.4
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• pp.483-491
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• 2017

The interdigitated germanium (Ge) meta-lsemiconductor-metal (MSM) photodetectors (PDs) with and without an $SiO_2$ anti-reflection (AR) layer was fabricated, and the effect of $SiO_2$ AR layer on their optoelectronic response properties were investigated in detail. The lowest reflectance of 15.6% at the wavelength of 1550 nm was obtained with a $SiO_2$ AR layer with a thickness of 260 nm, which was in a good agreement with theoretically calculated film thickness for minimizing the reflection of Ge surface. The Ge MSM PD with 260 nm-thick $SiO_2$ AR layer exhibited enhanced device performance with the maximum values of responsivity of 0.65 A/W, the quantum efficiency of 52.2%, and the detectivity of $2.49{\times}10^9cm\;Hz^{0.5}W^{-1}$ under the light illumination with a wavelength of 1550 nm. Moreover, time-dependent switching analysis of Ge MSM PD with 260 nm- thick $SiO_2$ AR layer showed highest on/off ratio with excellent stability and reproducibility. All this investigation implies that 260 nm-thick $SiO_2$ AR layer, which is effective in the reduction in the reflection of Ge surface, has a great potential for Ge based optoelectronic devices.

• Journal of Korean Ophthalmic Optics Society
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• v.16 no.2
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• pp.159-165
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• 2011

Purpose: In this paper, the reliability and reproductivity of anti-reflection (AR) coating on ophthalmic lens using optical monitoring system (OMS) were investigated. Methods: The random error simulation and RunSheet performance in Essential Macleod software to confirm possibility of AR coating using OMS were performed. The coating process of 19 batches was carried out in order to perform reproductivity test of AR coating after simulation process. Results: As a result, the coating results of 19 batches had shown the excellent reproductivity of about 0.5% error. Conclusions: We confirmed the excellent reproductivity and reliability of AR coating on ophthalmic lens using optical monitoring system from our results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.11
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• pp.991-994
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• 2007

In this paper, we have designed the anti-reflection(AR) coating for $1400{\sim}1600$ nm wavelength range on the ferrule facet of optical connector. The low-temperature ion-assisted deposition was applied to AR coating on the ferrule facet in order to avoid damage of optical connector. We have measured the refractive index of coating film($Ta_2O_5\;and\;SiO_2$) using the ellipsometer and optimized the film thickness using the SEM and thickness measurement equipment. UV-VIS-NIR spectrophotometer is used to measure transmissivity of the AR coated ferrule facet. The refractive index of $Ta_2O_5\;and\;SiO_2$ is $2.123{\sim}2.125$ and $1.44{\sim}1.442$, respectively, for $1400{\sim}1600$ nm wavelength range. The transmissivity of the AR coated ferule facet is more than 99.8 % for $1425{\sim}1575$ nm wavelength range and more than 99.5 % for $1400{\sim}1600$ nm wavelength range. The return loss of the AR coated ferrule facet is 30.1 dB.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.3
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• pp.248-251
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• 2009

We have investigated the effect of the quality of 1.3 um distributed feed back laser diode (DFB-LD) on the design of anti-reflection (AR) coatings. Optimal condition of AR coating to prevent internal feedback from both facets and reduce the reflection-induced intensity noise of laser diode was simulated with Macleod Simulator. Coating materials used in this work were ${Ti_3}{O_5}$ and $SiO_2$, of which design thickness were 105 nm and 165 nm, respectively. AR coating films were deposited by Ion-Assisted Deposition system. The electrical and optical properties of 1.3 um laser diode were characterized by Bar tester and Chip tester. Threshold current and slop-efficiency of DFB-LD were 27.56 mA 0.302 W/A. Far field pattern and wavelength of DFB-LD were $22.3^{\circ}(Horizontal){\times}24.4^{\circ}$ (Vertical), 1313.8 nm, respectively.

• Korean Journal of Optics and Photonics
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• v.14 no.3
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• pp.286-291
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• 2003

Asymmetric multiple quantum well ridge waveguide laser diodes (AMQW RWG LDs) with a wide and flat gain spectrum were designed and fabricated. The operating parameters and gain spectra were measured and analyzed for uncoated and anti-reflection (AR) coated LDs. For AR coated 500 mm-long RWG LOs, the extremely flat gain spectrum over a spectral range of 90 nm was obtained at the current 75 ㎃.

• Journal of the Korean Ceramic Society
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• v.44 no.10
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• pp.585-588
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• 2007

Silicon nitride films for an anti-reflection coating were deposited on silicon via RF magnetron sputtering using a $Si_3N4$ target. The best result was obtained at the sputtering condition of 340 W RF power, 5 mtorr Ar atmosphere, $100^{\circ}C$ substrate temperature. The films showed 7.9% reflectance minimum with 2.35 refractive index. 0.21 absorption coefficient at 66.6 nm thickness. The surface morphology showed a smooth and dense film with good adhesion to silicon surface.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.26 no.6
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• pp.220-224
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• 2016

Anti-reflection (AR) thin films were fabricated on a glass substrate by using an ultrasonic spray. Glycidoxypropyl trimethoxysilane (GPTMS) and tetraethyl orthosilicate (TEOS) were used to synthesize a sol-gel hybrid coating solution. The moving speed of spray nozzle was changed from 15~25 mm/s to control the coating thickness of AR thin film. As the moving speed of spray nozzle increased, the thickness of AR thin film decreased from 138 nm to 86 nm. When the AR thin film was fabricated by nozzle moving speed of 20 mm/s, the refractive index and thickness of AR thin film was measured to be 1.31 and 104 nm, respectively. The average reflectance and transmittance of AR thin film coating glass was measured to be 0.75 % and 94 %, respectively into the visible light range of 380~780 nm.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.985-987
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• 2005

Many applications, such as the lenses of mobile phones, involve complex 3D shapes. Delivering effective AR/AG surfaces in 3D is becoming an important challenge to the display industry. This paper shows how the combination of motheye structured AR hardcoats and In-Mold Decoration techniques can deliver this desirable functionality.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.1
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• pp.216-221
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• 2017

Reducing optical reflection in the visible light range, in order to increase the share of transmitted light and avoid the formation of ghost images in imaging, is important for polymer lens applications. In this study, polymer lenses with refractive indices of n=1.56, 1.60, and 1.67 were fabricated by the injection-molding method with a polymer lens monomer, dibutyltin dichloride as the catalyst and an alkyl phosphoric ester as the release agent. To investigate their anti-reflection (AR) effects, various AR coating structures, viz. a multi-layer AR coating structure, tri-layer AR coating structure with a discrete approximation Gaussian gradient-index profile, and tri-layer AR coating structure with a quarter-wavelength approximation, were designed and coated on the polymer lens by an E-beam evaporation system. The optical properties of the polymer lenses were characterized by UV-visible spectrometry. The material properties of the thin films, refractive index and surface roughness, were analyzed by ellipsometry and AFM, respectively. The most effective AR coating structure of the polymer lens with low refractive index, n=1.56, was the both side coating of multi-layer AR coating structure. However, both side coating of the tri-layered discrete approximation Gaussian gradient-index profile AR coating structure gave comparable results to the both side coating of the multi-layer AR coating structure for the polymer lens with a high refractive index of n=1.67.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.26 no.4
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• pp.35-40
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• 2012

In this study, the ultraviolet (UV) intensity of polymer insulator was measured using the Anti-Reflective (AR) coating lens on the occurrence of corona discharge. The UV intensity was compared before and after the AR coating. Under the 200-260[nm] of UV lens, the reflection rate before AR coating was 7.5~5.5[%] with 85-89[%] of transmission rate. After AR coating, however, the reflection rate decreased to 1.3~1.22[%] with improved transmission (97.4~97.6[%]). Then, the UV intensity by distance was measured in the polymer insulator. According to the measurement, the UV intensity increased 6.5 times at 37.5[%] of Vm/Vbd with 5[m] of distance. As distance increased, the growth rate declined. As high voltage increased, in addition, AR coating was less effective due to the count error caused by the UV sensor pulse signal overlap. Therefore, it appears that it would be more effective to detect corona discharge with 5[m] or less of distance at diagnosis of power facilities by AR coating and UV sensor sensitivity.