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http://dx.doi.org/10.6111/JKCGCT.2016.26.6.220

Fabrication of anti-reflection thin film by using sol-gel hybrid solution  

Park, Jong-Guk (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Lee, Ji-Sun (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Lee, Mi-Jai (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Lee, Young Jin (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Jeon, Dae-Woo (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Jin-Ho (Optic & Display Materials Center, Korea Institute of Ceramic Engineering and Technology)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.26, no.6, 2016 , pp. 220-224 More about this Journal
Abstract
Anti-reflection (AR) thin films were fabricated on a glass substrate by using an ultrasonic spray. Glycidoxypropyl trimethoxysilane (GPTMS) and tetraethyl orthosilicate (TEOS) were used to synthesize a sol-gel hybrid coating solution. The moving speed of spray nozzle was changed from 15~25 mm/s to control the coating thickness of AR thin film. As the moving speed of spray nozzle increased, the thickness of AR thin film decreased from 138 nm to 86 nm. When the AR thin film was fabricated by nozzle moving speed of 20 mm/s, the refractive index and thickness of AR thin film was measured to be 1.31 and 104 nm, respectively. The average reflectance and transmittance of AR thin film coating glass was measured to be 0.75 % and 94 %, respectively into the visible light range of 380~780 nm.
Keywords
Anti-reflection; Refractive index; Ultrasonic spray; Sol-gel; Wet process;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 J. Sczybowski, G. Brauer, G. Teschner and A. Zmelty, "Large-scale antireflective coatings on glass produced by reactive magnetron sputtering", Surf. Coat. Technol. 98 (1998) 1460.   DOI
2 A. Yen, H.I. Smith, M.L. Schattenbyrg and G.N. Tayor, "An anti-reflection coating for use with PMMA at 193 nm", J. Electrochem. Soc. 139 (1992) 616.   DOI
3 C.L. Luyer, L. Lou, C. Bovier, J.C. Plenet, J.G. Dumas and J. Mugnier, "Rare-earth-activated glassceramics waveguides", Opt. Mater. 18 (2001) 221.
4 J. Puetz, F.N. Chalvet and M.A. Aegerter, "Wet chemical deposition of transparent conducting coating in glass tubes", Thin Solid Films 442 (2003) 53.   DOI
5 D. Bouhafs, A. Moussi, A Chikouche and J.M. Ruiz, "Design and simulation of antireflection coating systems for optoelectronic devices: Application to silicon solar cells", Sol. Energy Mater. Sol. Cells 50 (1998) 79.   DOI
6 C.J. Brinker and G.W. Scherer, "Sol-gel science: The physics and chemistry of sol-gel processing", Sol-Gel Science (Academic Press, London, 1990).
7 P. Chrysicopoulou, D. Davazoglou, Chr. Trapalis and G. Koras, "Optical properties of very thin (< 100 nm) solgel $TiO_2$ films", Thin Solid Films 323 (1998) 188.   DOI
8 J.H. Kim and S. Shiratori, "Characterization of $TiO_2$/ polyelectrolyte thin film fabricated by a layer-by-layer self-assembly method", J. Appl. Phys. 44 (2005) 7588.   DOI
9 Y. Tsuge, J.H. Kim, Y. Sone, O. Kuwaki and S. Shiratori, "Fabrication of transparent $TiO_2$ film with high adhesion by using self-assembly methods: Application to super-hydrophilic film", Thin Solid Films 516 (2008) 2463.   DOI
10 H.J. Kim, K.J. Jeong and D.S. Bae, "Synthesis and characterization of Fe doped $TiO_2$ nanoparticles by a sol-gel and hydrothermal process", J. Mater. Res. 22 (2012) 249.
11 C. Girotto, B.P. Rand, J. Genoe and P. Heremans, "Exploring spray coating as a deposition technique for the fabrication of solution-processed solar cells", Sol. Energy Mater. Sol. Cells 93 (2009) 454.   DOI
12 C. Martinet, V. Paillard, A. Gagnaire and J. Joseph, "Deposition of $SiO_2$ and $TiO_2$ thin films by plasma enhanced chemical vapor deposition for antireflection coating", J. Non-Cryst. Solids 216 (1997) 77.   DOI
13 J. Zhao and M.A. Green, "Optimized antireflection coatings for high-efficiency silicon solar cells", IEEE Trans. Electron Dev. 38 (1991) 1925.   DOI
14 L. Miao, L.F. Su, S. Tanemura, C.A.J. Fisher, L.L. Zhao, Q. Liang and G. Xu, "Cost-effective nanoporous $SiO_2$-$TiO_2$ coatings on glass substrates with antireflective and self-cleaning properties", Appl. Energy 122 (2013) 1198.
15 J.G. Park, D.W. Jeon, M.J. Lee, T.Y. Lee, J.H. Hwang, D.S. Bae and J.H. Kim, "Fabrication of single layer anti-reflection thin film by sol-gel method", J. Korean Inst. Electr. Electron. Mater. Eng. 28 (2015) 821.