Characteristics of polycrystalline 3C-SiC micro pressure sensors for high temperature applications (초고온용 다결정 3C-SiC 마이크로 압력센서의 특성)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2008.06a
- /
- pp.387-388
- /
- 2008