Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.387-388
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- 2008
Characteristics of polycrystalline 3C-SiC micro pressure sensors for high temperature applications
초고온용 다결정 3C-SiC 마이크로 압력센서의 특성
- Thien, Duong Xuan (School of Electrical Eng., University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
- Published : 2008.06.19
Abstract
High temperature micro pressure sensors were fabricated by polycrystalline (poly) 3C-SiC piezoresistors formed by oxidized SOI substrates with APCVD. These have been designed by bulk micromachining below