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http://dx.doi.org/10.4313/JKEM.2010.23.6.487

Effects of In-situ doping Concentration on the Characteristics of Porous 3C-SiC Thin Films  

Kim, Kang-San (School of Electrical Engineering, University of Ulsan)
Chung, Gwiy-Sang (School of Electrical Engineering, University of Ulsan)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.6, 2010 , pp. 487-490 More about this Journal
Abstract
This paper describes the elecrtical and optical characteristics of $N_2$ doped porous 3C-SiC films. Polycrystalline 3C-SiC thin films are anodized by $HF+C_2H_5OH$ solution with UV-LED exposure. The growth of in-situ doped 3C-SiC thin films on p-type Si (100) wafers is carried out by using APCVD (atmospheric pressure chemical vapor deposition) with a single-precursor of HMDS (hexamethyildisilane: $Si_2(CH_3)_6)$. 0 ~ 40 sccm $N_2$ was used for doping. After the growth of doped 3C-SiC, porous 3C-SiC is formed by anodization with $7.1\;mA/cm^2$ current density for anodization time of 60 sec. The average pore diameter is about 30 nm, and etched area is increased with $N_2$ doping rate. These results are attributed to the decrease of crystallinity by $N_2$ doping. Mobility is dramatically decreased in porous 3C-SiC. The band gaps of polycrystalline 3C-SiC films and doped porous 3C-SiC are 2.5 eV and 2.7 eV, respectively.
Keywords
Porous 3C-SiC; Anodization; In-situ doping; Electrical; Optical;
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