• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.579-584
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• 2008

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.948-954
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• 2008

In this study, vibrational characteristics of two nano-imprinting stages is analyzed and compared with respect to the methodology to support the upper-plate of the stage. The first type of the stage has three supporters at each corners of the stage and one thrust bearing at the center of the stage. The other type of the stage has four supporter in each corner of the stage without a thrust bearing. The FEM software with flexible modeling is used for the normal mode analysis. The result depicts the difference of vibrational characteristics caused by the difference of support methods. The design criteria for the precision nano-imprinting stage is also discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.844-849
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• 2008

A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.211-217
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• 2007

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 추계학술대회 논문집
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• pp.415-416
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• 2010

• 한국산학기술학회논문지
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• 제13권4호
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• pp.1453-1459
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• 2012

본 연구에서는 보이스코일 모터와 압전 구동기를 동일 축으로 배치함으로써 초정밀 위치결정뿐만 아니라 동특성을 개선할 수 있도록 하는 듀얼 스테이지를 다룬다. 듀얼 스테이지는 모델링이 엉성할 경우 오히려 나쁜 동특성을 보이는 단점이 있다. 이 논문은 본드그래프를 이용하여 듀얼 스테이지를 모델링하고 동적 상태방정식을 본드그래프에서 유도하였다. 또한 동특성을 향상시키기 위한 보상기의 설계 예시를 보이고 있으며, 시뮬레이션을 통해 검증하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.827-831
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• 2008

In this paper, kinematic analysis for a planar 3-DOF redundant stage which has four actuators is presented by using SimMechanics software package. SimMechanics is a block sets of the Matlab/Simulink package. The SimMechanics enables a simplified model for a complex kinematic mechanism, since kinematic relationship between joints and linkages for the kinematic chains are expressed as line vectors and block diagrams. Here, positional error and limit values of movement ranges of the stage are evaluated by using the SimMechanics. The validity of the kinematic characteristics model was compared with theoretical kinematic analyses for the 3-DOF stage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.563-564
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• 2010

• 한국항공우주학회지
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• 제35권4호
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• pp.275-280
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• 2007

터빈스테이지는 정익과 동익으로 구성되어 있다. 정익은 동익이 필요한 축 파워를 내도록 입구조건을 만들어준다. 정익 끝단에서 발생된 후류는 동익과 간섭을 일으킨다. 본 연구에서는 이러한 정익 동익간의 간섭현상을 고찰하였다. 정익과 동익의 간격이 큰 경우, 유동해석은 독립적으로 수행 될 수 있다. 정익 주위의 유동을 해석한 후, 발생되는 후류특성을 계산하여 동익의 유동해석에 포함시키었다. 정익에서 발생된 후류는 동익에 접근함에 따라 구부러지고 절단되며 흐름방향으로 연장되는 특성을 가지고 있다. 또한 정익과 동익 간격 영향을 고찰하였으며 그 간격이 가까울수록 후류의 압력 피크로 인한 압력 및 양력손실이 커짐을 알 수 있다.

• 제어로봇시스템학회논문지
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• 제14권4호
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• pp.385-391
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• 2008

To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.