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http://dx.doi.org/10.5302/J.ICROS.2008.14.4.385

The Modified Two-axis Vector Controller of Linear Induction Motor to Apply to the Non-contact Stage with Large Workspace  

Jung, Kwang-Suk (충주대학교 기계공학과)
Lee, Sang-Heon (안동대학교 기계공학부)
Publication Information
Journal of Institute of Control, Robotics and Systems / v.14, no.4, 2008 , pp. 385-391 More about this Journal
Abstract
To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.
Keywords
planar stage; linear induction motor; flat panel display; vector control; D-Q decomposition; lumped parameter model;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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