Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2008.04a
  • /
  • Pages.579-584
  • /
  • 2008
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Vibration Analysis of a Nano Imprinting Stage Using CAE

CAE를 이용한 나노 임프린팅 스테이지의 진동 해석

  • 이강욱 (국민대학교 CAELAB) ;
  • 이재우 (국민대학교 기계자동차공학부) ;
  • 이성훈 (국민대학교 기계자동차공학부) ;
  • 임시형 (국민대학교 기계자동차공학부) ;
  • 정재일 (국민대학교 기계자동차공학부) ;
  • 임홍재 (국민대학교 기계자동차공학부)
  • Published : 2008.04.17
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Abstract

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

Keywords