Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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The vibrational characteristics of nano-imprinting stages with respect to supporter types

지지방식의 차이에 따른 나노 임프린팅 스테이지의 진동 특성 비교

  • 이성훈 (국민대학교 자동차 전문대학원 차체 및 샤시) ;
  • 박성빈 (국민대 자동차전문대학원) ;
  • 이강욱 (국민대 자동차전문대학원) ;
  • 정재일 (국민대 자동차전문대학원) ;
  • 임홍재 (국민대 기계자동차공학부)
  • Published : 2008.11.05
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Abstract

In this study, vibrational characteristics of two nano-imprinting stages is analyzed and compared with respect to the methodology to support the upper-plate of the stage. The first type of the stage has three supporters at each corners of the stage and one thrust bearing at the center of the stage. The other type of the stage has four supporter in each corner of the stage without a thrust bearing. The FEM software with flexible modeling is used for the normal mode analysis. The result depicts the difference of vibrational characteristics caused by the difference of support methods. The design criteria for the precision nano-imprinting stage is also discussed.

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