• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.579-584
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• 2008

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.890-893
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• 2004

The ultra precision machining in industrial field are increased day by day. The diamond turning has been used generally, but now is faced with limitation of use, because of higher requirement of production field. The electron beam lithography is alternative in machining area as semiconductor production. For EB lithography, 5 axis vacuum stage is required to duplicate small and large patterns on wafer. The stage is composed of 2 rotational axis and 3 translational axis with 5 DC servo motors. The positioning repeatability and resolution of Z axis feed unit are 3.21$\mu$m and 0.5 $\mu$m/step enough to apply to lithography.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.211-217
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• 2007

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.844-849
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• 2008

A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.9 s.186
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

• Journal of Sericultural and Entomological Science
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• v.16 no.2
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• pp.119-125
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• 1974

When the nomal silkworms reached active time of 3rd instar stage both non-moulting larva and normal silkworms from the same rearing tray were collected and fixed. The silkworms in 4th instar stage whose growth was as dwarfish as those in 1st and 2nd instar stages were also collected and fix with the normal silkworms. Non-moulting larva and normal silkworms were morphologically compared and the examined results from the tissue inspection are summarized as follows： 1. In spite of the fact that the normal silkworms reached the active eating time of 3rd instar stage non-moulting silkworms were dwarfish as if they had been reared for two days. Non-moulting silkworms which were observed at the time of 4th instar stage showed no much difference in their growth. 2. There was the tendency that the exuvial gland as was shown in Fig. 1 and 2 was flat cyslidium of ellipse and its size at thorax was small shile the gland at abdomen was big. 3. The exuvial gland at thorax has been reported to be bigger at thoracic base than at dorsal vessel but according to the present it was examined to be irregular. 4. The size of exuvial gland of silkworms in the active eating stage of 3rd instar was from 151.3${\mu}$ (major axis) to 94.5${\mu}$ (minor axis) at prothorax and from 568.6${\mu}$ (major axis) to 495.1${\mu}$ (minor axis) at 7th abdominal segment. The sire oe exuvial gland of non-moulting silkworm was 57.5${\mu}$ (major axis) to 51.3${\mu}$ (minor axis) at prothorax and from 91.5${\mu}$ (major axis) to 75.5${\mu}$ (minor axis) at 5th abdominal segment (see Fig. 1) 5. When the normal silkworms reached 4th instar active eating stage its exuvial gland was compared to that of dwarfish silkworm. The result was that the size of normal silkworm at prothorax was from 252.2${\mu}$ (major axis) to 131.6${\mu}$ (minor axis) and the size of exuvial gland at 7th abdominal segment was from 691.5${\mu}$ (major axis) to 493.4${\mu}$ (minor axis) while the sire of exuvial gland of non-moulting at prothorax was from 71.4${\mu}$ (major axis) to 61.5${\mu}$ (minor axis) and the size of the non-moulting silkworm's 8th abdominal segment was from 94.6${\mu}$ (major axis) to 71.5${\mu}$ (minor axis) (See Table 2) 6. There was a remarkable difference in the from of exuvial gland of non-moulting silkworm. The size of alveolar of the non-moulting silkworm was many times larger compared to that of normal silkworm 7. There was no great difference between secretory cells of normal and non-moulting silkworms but the granular type exuvial gland was small in sire compared to that of normal silkworm.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

• The Korean Journal of Zoology
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• v.30 no.3
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• pp.248-260
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• 1987

In order to investigate the importance of the prospective mesodermal and endodermal blastomeres at 32-cell stage in the anis formation, blastomeres were deleted or transplanted into the ventrovegital site of another normal embryo. The results are as follows: When the dorsomesodermal or dorsoendodermal blastomeres were deleted, there was a substantial developmental lesion in the axis structure. However, when the ventromesodermal or ventroendodermal blastomeres were deleted, the formation of an axis structure was nearly normal. The dorsomesodermal or dorsoendodermal blastomeres which were transplanted into the ventral side of the normal 32-cell embryo caused the formation of a secondary body axis, and the capacity of the second axis induction in the dorsomesodermal blastomeres was a little higher than that in the dorsoendodermal blastomeres. These results imply that both the dorsomesodermal and dorsoendodermal blastomeres are involved in the formation of a set of dorsal body structures during early embryogenesis. As well, in order to investigate the axis inducing capacity in the early cleavage embryos, the dorsovegital blastomeres were transplanted into the ventrovegital site at 4-cell, 8-cell and 16-ceIL stage respectively. As a ruts·fIt, a second body axis was formed. Therefore, it seems that the early cleavage embryo as 4-cell stage dorsal blastomeres contain some informations necessary for the axis formation.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.