Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Development of 3-axis fine Positioning Stage : Part 2. Fabrication and Performance Evaluation

초정밀 3축 이송 스테이지의 개발 : 2. 제작 및 성능 평가

  • 강중옥 (금오공과대학교 대학원 기전공학과) ;
  • 백석 (한국기계연구원) ;
  • 한창수 (한국기계연구원) ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • Published : 2004.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

Keywords

References

  1. 강중옥, 서문훈, 한창수, 홍성욱, '초정밀 2 축이송 스테이지의 개발 : 1. 해석 및 설계,' 한국정밀공학회지, Vol.21, No.3, 2004
  2. Smith, S. T., Flexures, Gordon and Breach Science Publishers, 2000
  3. Physik Instrumente, Tutorial: Piezoelectrics in Positioning, http:/www.physikinstrumente.com
  4. Li, X., Jia, Z. and Liu, J., 'A combined electrical machining process for the production of a flexure hinge,' Journal of Materials Processing Technology, Vol. 71, pp. 373-376, 1997 https://doi.org/10.1016/S0924-0136(97)00100-3
  5. 한창수, 김경호, 이찬홍, '초정밀 마이크로 위치 결정 스테이지의 설계,' 한국정밀공학회 추계학술대회논문집, pp. 300-304, 2001
  6. Ryu, J. W., Gweon, D. G. and Moon, K. S., 'Optimal design of a flexure hinge based XYθ wafer stage,' Journal of the American Society for Precision Engineering, Vol. 21, pp. 18-28, 1997 https://doi.org/10.1016/S0141-6359(97)00064-0
  7. Yang, R., Jouaneh, M. and Schweizer, R., 'Design and characterization of a low-profile micro positioning stage,' Journal of the American Society for Precision Engineering, Vol. 18, pp. 20-29, 1996 https://doi.org/10.1016/0141-6359(95)00032-1
  8. Janker, P., et. al, 'Mechatronics using piezoelectric actuators,' Journal of the European Ceramic Society, Vol. 19, pp. 1127-1131, 1999 https://doi.org/10.1016/S0955-2219(98)00388-4
  9. Baek, S., Han, C. S. and Noh, M. G., 'Design of a preload device for PZT actuator using permanent magnet,' INTERMAG 2003 IEEE Transactions on Magnetics(accepted) https://doi.org/10.1109/INTMAG.2003.1230681
  10. Harris, T.A., Roling Bearing Analysis, 4th ed., John-Wiley & Sons, Inc., 2001