Browse > Article

Development of 3-axis fine Positioning Stage : Part 2. Fabrication and Performance Evaluation  

Kang, Joong-Ok (금오공과대학교 대학원 기전공학과)
Baek, Seok (한국기계연구원)
Han, Chang-Soo (한국기계연구원)
Hong, Sung-Wook (금오공과대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.3, 2004 , pp. 155-162 More about this Journal
Abstract
This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.
Keywords
Fine stage; Flexure hinge; Piezoelectric actuator; Point contact; Magnetic preload; Natural frequency; Hertzian contact; Hysterisis; Straightness; Angular error;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 강중옥, 서문훈, 한창수, 홍성욱, '초정밀 2 축이송 스테이지의 개발 : 1. 해석 및 설계,' 한국정밀공학회지, Vol.21, No.3, 2004   과학기술학회마을
2 Smith, S. T., Flexures, Gordon and Breach Science Publishers, 2000
3 Physik Instrumente, Tutorial: Piezoelectrics in Positioning, http:/www.physikinstrumente.com
4 Li, X., Jia, Z. and Liu, J., 'A combined electrical machining process for the production of a flexure hinge,' Journal of Materials Processing Technology, Vol. 71, pp. 373-376, 1997   DOI   ScienceOn
5 한창수, 김경호, 이찬홍, '초정밀 마이크로 위치 결정 스테이지의 설계,' 한국정밀공학회 추계학술대회논문집, pp. 300-304, 2001   과학기술학회마을
6 Ryu, J. W., Gweon, D. G. and Moon, K. S., 'Optimal design of a flexure hinge based XYθ wafer stage,' Journal of the American Society for Precision Engineering, Vol. 21, pp. 18-28, 1997   DOI   ScienceOn
7 Yang, R., Jouaneh, M. and Schweizer, R., 'Design and characterization of a low-profile micro positioning stage,' Journal of the American Society for Precision Engineering, Vol. 18, pp. 20-29, 1996   DOI   ScienceOn
8 Baek, S., Han, C. S. and Noh, M. G., 'Design of a preload device for PZT actuator using permanent magnet,' INTERMAG 2003 IEEE Transactions on Magnetics(accepted)   DOI
9 Harris, T.A., Roling Bearing Analysis, 4th ed., John-Wiley & Sons, Inc., 2001
10 Janker, P., et. al, 'Mechatronics using piezoelectric actuators,' Journal of the European Ceramic Society, Vol. 19, pp. 1127-1131, 1999   DOI   ScienceOn