• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.9
• /
• pp.172-178
• /
• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state -of-the-art reaches the region of sub-nanometers. So far, the demand has been met by increasing the clock speed that drives the electronics involved fur the phase measurement of the Doppler shift, but its further advance is being hampered by the technological limit of modem electronics. To cope with the problem, in this investigation, we propose a new scheme of phase -measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with a stable reference signal generated from a special phase- locked-loop. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special form of frequency up-down counting technique is combined with the super-heterodyning. This allows performing required phase unwrapping simply by using programmable digital gates without 2n ambiguities up to the maximum velocity guaranteed by the original beat frequency.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2006.05a
• /
• pp.150-155
• /
• 2006

PZT는 높은 분해능을 구현할 수 있는 구동기이지만 그 구동 범위가 협소하다는 단점이 있다. 최근에는 이러한 단점을 극복하기 위한 여러가지 메커니즘들이 제안되고 있다. 본 논문에서는 PZT를 이용하여 넓은 범위의 높은 분해능을 갖는 회전형 스테이지를 개발하였다. 개발되어진 회전형 스테이지는 빔 형태의 예압구조를 이용하였으며 일정한 마찰력을 구현하기 위하여 알루미나와 오닉스를 사용하였다. 대 변위와 미소변위를 동시에 구동하기 위하여 Dual mode control을 적용하였다. 또한 레이지 간섭계를 이용하여 구동기의 최대속도와 분해능을 측정하였으며 Sinsweep를 이용하여 구동기의 주파수 응답을 구하였다.

• Journal of the Computational Structural Engineering Institute of Korea
• /
• v.24 no.1
• /
• pp.97-106
• /
• 2011

In this study, viscoplastic material properties of solder alloy which is used in the electronics packages are inversely estimated. A specimen is fabricated to this end, and an experiment is conducted to examine deformation by Moir$\acute{e}$ interferometry. As a result of the experiment, bending displacement of the specimen and shear strain of the solder are obtained. A viscoplastic finite element analysis procedure is established, and the material parameters are determined to match closely with the experiments. The uncertainties which include inherent experimental error and insufficient data of experiments are addressed by using the method of computer model calibration. As a result, material parameters are identified in the form of confidence interval, and the displacements and strains using these parameters are predicted in the form the prediction interval.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.20 no.1
• /
• pp.27-32
• /
• 2000

In this paper, ultrasonic wave in the thermoelastic regime was generated in a steel disk by illuminating a pulse laser (Q-switched Nd:YAG) on the surface of the sample and was detected on the other side by Michelson interferometer which was stabilized by feed back control. The experimentally detected displacement waveform of the ultrasonic wave showed good agreement with the theoretically expected one. Also it was shown that sound speeds of longitudinal and shear wave were similar to ones measured by pulse-echo method using a contact transducer. As an application of the noncontact ultrasonic measurement by using laser based ultrasonics, the sound speed in the sample was monitored while the sample was heated in a furnace, and the result showed that it decreased according to the increase of sample temperature.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.30 no.5
• /
• pp.471-478
• /
• 2010

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different from the corresponding bulk properties and thus there has been a strong need for the development of a reliable test method to measure the mechanical properties of a thin film. We have developed an alternative and convenient test method to overcome the limitations of previous membrane deflection experiment and uniaxial tensile test by adopting a white light interferometer having sub-nanometer out-of-plane displacement resolution. The freestanding aluminium specimens are tested to verity the effectiveness of the test method developed and get the tensile properties. The specimens are 0.5 rum wide, $1{\mu}m$ thick and fabricated through MEMS processes including sputtering. 1 to 5 specimens are fabricated on Si dies. The membrane deflection experiments are carried out by using a homemade tester consisted of a motor-driven loading tip, a load cell, and 6 DOF alignment stages. The test system is compact enough to set it up beneath a commercial white light interferometric microscope. The white light fringes are utilized to align a specimen with the tester. The Young's modulus and yield point stress of the aluminium film are 62 GPa and 247 MPa, respectively.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.26 no.5
• /
• pp.321-328
• /
• 2006

In this study, the deformation oi wall thinning elbow is measured and the position of the internal thinning defect is found out by shearography. Shearography is an optical method which has applied to nondestructive testing (NDT) and the strain/stress and deformation analysis. This technique has the merit of the directly measuring the first derivative of displacement with sensitivity which can be adjusted by handling the tilt mirror in the interferometer. In this paper, we tested carbon steel pipe locally wall thinned and loaded internal pressure and the shearography was applied to measure the out-of-plane deformation of wall thinning elbow and to investigate the internal thinning defect of it. From the results, it was confirmed that this technique is proper to the practical application on the pipe line system with internal defect.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.573-576
• /
• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.24 no.6
• /
• pp.581-589
• /
• 2004

In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.32 no.2
• /
• pp.177-184
• /
• 2012

An optical defect detection method using ESPI(electronic speckle pattern interferometry) is proposed. ESPI is widely used as a non-contact measurement system which show deformation and phase map in real time. ESPI can be divided as the in-plane, out-of-plane and shearography by operation principle and target object and also divided with bulk type and optic fiber type by the optic configurations. This paper is focused on optic fiber type out-of-plane ESPI, which has the following advantages: (1) low cost; (2) reduction of the unreliable factors generated by separated optic components; (3) simplification of the optic configuration; (4) great reduction of volume; (5) flexibility, to be easily designed into different structures to adapt to inaccessible environments such as pipeline cavity and so on.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.20 no.4
• /
• pp.39-48
• /
• 2021

In this paper, an in-plane deformation measuring system using a dual-beam shear interferometer was constructed to measure the in-plane deformation of the measuring object. The in-plane deformation of the object was quantitatively measured according to the load and surface treatment conditions of the object. We also verified the reliability of the proposed technique by simultaneously performing the technique with an electronic speckle pattern interferometry system (ESPI), which is another laser application measurement technology. Digital shearography directly measures the deformation gradient or strain components and has the advantages of being full-field, noncontact, highly sensitive, and robust. It offers a much higher measurement sensitivity compared with noncoherent measurement methods and is more robust and applicable to in-field tests.