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Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test  

Kim, Ki-Bok (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
Ahn, Bong-Young (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
Park, Hae-Won (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
Kim, Young-Joo (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
Lee, Seung-Seok (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.24, no.6, 2004 , pp. 581-589 More about this Journal
Abstract
In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications.
Keywords
cMUT; MEMS; non-contact; displacement of membrane; interferometer;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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