Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

미세가공 정전용량형 초음파 탐촉자 개발(III) - 탐촉자 성능평가

  • Kim, Ki-Bok (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Ahn, Bong-Young (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Park, Hae-Won (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Kim, Young-Joo (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science) ;
  • Lee, Seung-Seok (Center for Environment & Safety Measurement, Korea Research Institute of Standards and Science)
  • 김기복 (한국표준과학연구원 환경안전계측센터) ;
  • 안봉영 (한국표준과학연구원 환경안전계측센터) ;
  • 박해원 (한국표준과학연구원 환경안전계측센터) ;
  • 김영주 (한국표준과학연구원 환경안전계측센터) ;
  • 이승석 (한국표준과학연구원 환경안전계측센터)
  • Published : 2004.12.30
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Abstract

In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications.

본 연구는 선행연구의 결과를 바탕으로 cMUT를 개발하여 그 특성을 분석하기 위하여 수행되었다. 미세 반도체 제작공정을 적용하여 cMUT를 제작하여 단면특성을 측정하여 분석하였다. 제작된 cMUT의 미소 진동 막의 변위를 측정할 수 있는 마이켈슨 위상변조 간섭계를 구성하여 측정결과와 이론적인 해석결과와 비교하였다. cMUT의 초음파 특성을 분석하기 위하여 송수신 시스템을 구성하였다 비접촉 방법으로 cMUT에 의해 발생되는 초음파 신호를 수신하여 수신파형의 특성을 분석한 결과 양호한 주파수 특성을 나타내었다. 본 연구에서 개발된 cMUT는 향후 비접촉식 초음파 응용분야에 다양하게 활용될 것으로 판단된다.

Keywords

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