• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.1
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• pp.73-79
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• 2013

In this study, NIMAX material has been processed using the three-dimensional measuring instrument and white light interferometer. they were tested to roundness and surface roughness and results are as follows: As for a cutting characteristic, it indicated that F4 showed a lower result than 2F showed due to the high hardness of the material and showed a good result when spindle rotation speed and tool feed were low. As for the measurement of roundness through 3-Dimensional measuring machine, it indicated that 4F showed a good result like the condition of cutting component and that roundness showed a good result when spindle rotation speed of 1,700 rpm and tool feed speed of 85 mm/min were applied. As for the surface roughness of processing surface, Surface roughness showed better 4F than 2F and conditions of spindle rotation speed 1,700 rpm, tool feed rate 55 mm/min showed good results in the Ra $0.4025{\mu}m$.

• Korean Journal of Optics and Photonics
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• v.11 no.6
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• pp.395-399
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• 2000

In white light interferometry, fast and accurate localization of the fringe visibility is the most essential part in application of the principle. So much attention has been concentrated on speeding up the process, we in this study decided to investigate the results of the various peak-finding algorithms. Of the many approaches, two most simplistic algorithms were selected for their straightforwardness and robustness. Both were equally accurate in measuring the step height of a sample, but the method based on the weighted average technique proved to be truer to the surface topography. A model explaining the shortcomings of the correlation technique is presented. ented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.23 no.1
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• pp.63-69
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• 2019

The relative position of the orbital eye can be a criterion for evaluating several pathological conditions. It is especially useful to diagnose orbital fractures, thyroid eye disease, orbital tumors and to evaluate the outcome of medication and surgical treatment. Hertel and Naugle are representative measurement tools used to measure eyeball protrusion values, and have different measurement results, such as fixed orbits, every time they are inspected, even if the same inspector repeatedly measures them. Even with the same calibrator, it is inevitable that different manufacturers will change the design of the stationary part of the orbit, causing the surveyor to make a measurement error. In this paper, we designed and fabricated a protrusion measuring device using a white light interferometer and measured the protrusion of the human eye and found that the precision and repeatability were significantly higher than the manual measurement method.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.21 no.12
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• pp.2341-2346
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• 2017

The relative position of the eyeballs in the orbit can be a criterion for estimating multiple pathological conditions. Especially, it is useful to diagnose orbital fracture, thyroid eye disease, orbital tumor, and to evaluate the result of drug and surgical treatment. The Hertel and Naugle exophthalmometer, which are the most commonly used measuring instruments for measuring the prominence of the eye, are different from each other. Even if the same examiner repeatedly measures, it is inevitable. Also, even if the same exophthalmometer is different from the manufacturing company, the design of the fixed part of the orbit is different, and a measurement error is caused by the inspectors. In this paper, we propose a method of automatic measurement that can increase the accuracy and repeatability of measurement of exophthalmos using white light scanning interferometer, which is a 3D image measurement technique.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.11
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• pp.999-1006
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• 2014

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.565-568
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• 2005

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.

• Journal of the Korea Institute of Military Science and Technology
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• v.9 no.3
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• pp.109-115
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• 2006

The investigation of the polarization cross-coupling in fiber coils was made using white light Michelson interferometer. The white light interferometer has a light source of about 13nm spectral bandwidth and measurement resolution of less than -80dB. The measurement found that the 200m fiber coil has a polarization cross-coupling of about -64dB in average and -46dB in maximum.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.23-24
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• 2006

We present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.85-91
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• 2008

White light scanning interferometry has gotten a firm position in 3D surface profile measuring field. Recently, the LCD industry gave a chance for this technology to enter into real industry fields. It is known that white-light phase-shifting algorithm give a best resolution compare to other algorithms, but there are some problems to be resolved. One of them is 300nm jump in height profile, called bat-wing effect. The main reason of this problem is an ambiguity of phase-peak detection algorithm, and some solution has been proposed, but it didn't work perfectly. In this paper, I will show the cases when these effects are occurred, and these height discrepancies will be almost disappeared when broad-band illuminators are used.