1 |
Flournoy, P., McClure, R., and Wyntjes, G., "Whitelight Interferometric Thickness Gauge," Applied optics, Vol. 11, No. 9, pp. 1907-1915, 1972.
DOI
|
2 |
You, J. and Kim, S.-W., "Optical Inspection of Complex Patterns of Microelectronics Products," CIRP Annals-Manufacturing Technology, Vol. 57, No. 1, pp. 505-508, 2008.
DOI
|
3 |
You, J., Kim, Y. J., and Kim, S. W., "Gpu-accelerated White-Light Scanning Interferometer for Large-Area, High-Speed Surface Profile Measurements," Int. Journal of Nanomanufacturing, Vol. 8, No. 1, pp. 31-39, 2012.
DOI
|
4 |
de Groot, P. and Deck, L., "Three-dimensional Imaging by Sub-Nyquist Sampling of White-Light Interferograms," Optics letters, Vol. 18, No. 17, pp. 1462-1464, 1993.
DOI
ScienceOn
|
5 |
P de Groot, P. and Colonna de Lega, X., "Signal Modeling for Low-Coherence Height-Scanning Interference Microscopy," Applied optics, Vol. 43, No. 25, pp. 4821-4830, 2004.
DOI
|
6 |
Dandliker, R., Zimmermann, E., and Frosio, G., "Electronically Scanned White-Light Interferometry: A Novel Noise-Resistant Signal Processing," Optics letters, Vol. 17, No. 9, pp. 679-681, 1992.
DOI
|
7 |
Sandoz, P., "An Algorithm for Profilometry by White-light Phase-shifting Interferometry," Journal of modern optics, Vol. 43, No. 8, pp. 1545-1554, 1996.
|
8 |
Chim, S. S. and Kino, G. S., "Phase Measurements using the Mirau Correlation Microscope," Applied optics, Vol. 30, No. 16, pp. 2197-2201, 1991.
DOI
|