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Phase Peak Ambiguity According to Illumination in White-Light Phase-Shifting Interferometry  

Kim, Gee-Hong (한국기계연구원 나노기계연구본부)
Lee, Hyung-Seok ((주)나노시스템)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.1, 2008 , pp. 85-91 More about this Journal
Abstract
White light scanning interferometry has gotten a firm position in 3D surface profile measuring field. Recently, the LCD industry gave a chance for this technology to enter into real industry fields. It is known that white-light phase-shifting algorithm give a best resolution compare to other algorithms, but there are some problems to be resolved. One of them is 300nm jump in height profile, called bat-wing effect. The main reason of this problem is an ambiguity of phase-peak detection algorithm, and some solution has been proposed, but it didn't work perfectly. In this paper, I will show the cases when these effects are occurred, and these height discrepancies will be almost disappeared when broad-band illuminators are used.
Keywords
White-Light Interferometry; Phase-Shifting Algorithm; 3D Profile Measurement; Bat-Wing Effect;
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Times Cited By KSCI : 1  (Citation Analysis)
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