Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Sub-sampling Technique to Improve the Measurement Speed of White Light Scanning Interferometry

백색광 주사 간섭계의 측정 속도 개선을 위한 서브 샘플링 기법 연구

  • Received : 2014.07.23
  • Accepted : 2014.09.22
  • Published : 2014.11.01
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Abstract

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

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References

  1. Flournoy, P., McClure, R., and Wyntjes, G., "Whitelight Interferometric Thickness Gauge," Applied optics, Vol. 11, No. 9, pp. 1907-1915, 1972. https://doi.org/10.1364/AO.11.001907
  2. You, J. and Kim, S.-W., "Optical Inspection of Complex Patterns of Microelectronics Products," CIRP Annals-Manufacturing Technology, Vol. 57, No. 1, pp. 505-508, 2008. https://doi.org/10.1016/j.cirp.2008.03.127
  3. You, J., Kim, Y. J., and Kim, S. W., "Gpu-accelerated White-Light Scanning Interferometer for Large-Area, High-Speed Surface Profile Measurements," Int. Journal of Nanomanufacturing, Vol. 8, No. 1, pp. 31-39, 2012. https://doi.org/10.1504/IJNM.2012.044653
  4. de Groot, P. and Deck, L., "Three-dimensional Imaging by Sub-Nyquist Sampling of White-Light Interferograms," Optics letters, Vol. 18, No. 17, pp. 1462-1464, 1993. https://doi.org/10.1364/OL.18.001462
  5. P de Groot, P. and Colonna de Lega, X., "Signal Modeling for Low-Coherence Height-Scanning Interference Microscopy," Applied optics, Vol. 43, No. 25, pp. 4821-4830, 2004. https://doi.org/10.1364/AO.43.004821
  6. Dandliker, R., Zimmermann, E., and Frosio, G., "Electronically Scanned White-Light Interferometry: A Novel Noise-Resistant Signal Processing," Optics letters, Vol. 17, No. 9, pp. 679-681, 1992. https://doi.org/10.1364/OL.17.000679
  7. Sandoz, P., "An Algorithm for Profilometry by White-light Phase-shifting Interferometry," Journal of modern optics, Vol. 43, No. 8, pp. 1545-1554, 1996.
  8. Chim, S. S. and Kino, G. S., "Phase Measurements using the Mirau Correlation Microscope," Applied optics, Vol. 30, No. 16, pp. 2197-2201, 1991. https://doi.org/10.1364/AO.30.002197