• Journal of the Korean Vacuum Society
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• v.16 no.6
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• pp.479-482
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• 2007

InN nanograins were directly grown on $0.3^{\circ}$-miscut (toward M-plane) c-plane sapphire substrates by hydride vapor phase epitaxy (HVPE) and their growth characteristics were investigated by utilizing x-ray scattering. Depending on the various growth parameters, the formation of InN was sensitively influenced. Six samples were grown by changing HCl flow rate, the substrate temperature and Ga/In source zone temperature. All the samples were grown on unintentionally $NH_3-pretreated$ sapphire substrates. By increasing the flow rate of HCl from 10 sccm to 20 sccm, the formation of GaN grains with different orientations was observed. On the other hand, when the substrate temperature was raised from $680^{\circ}C$ to $760^{\circ}C$, the increased substrate temperature dramatically suppressed the formation of InN. A similar behavior was observed for the samples grown with different source zone temperatures. By decreasing the source zone temperature from $460^{\circ}C$ to $420^{\circ}C$, a similar behavior was observed.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.481-487
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• 2009

To control the diameter size of the carbon nanofilaments (CNFs), SF6 was incorporated in the source gases ($C_2H_2/H_2$) during the initial deposition stage. The source gases and $SF_6$ were manipulated as the cyclic on/off modulation of $C_2H_2/H_2/SF_6$ flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By $SF_6\;+\;H_2$ flow injection during the cycling etching interval time, the diameter size of CNFs was extremely decreased. The cause for the decrease in the diameter size of the individual CNFs by the cyclic on/off modulation process of $C_2H_2/H_2/SF_6$ flow was discussed in association with the slightly enhanced etching ability by the incorporation of $SF_6$.

• Journal of the Korean Ceramic Society
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• v.39 no.5
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• pp.467-472
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• 2002

Long Carbon Nanotubes(CNTs) were cut by diamond lapping film followed by observation using SEM. The paste was prepared by mixing shortened CNT powder, ${\alpha}$-terpineol used as a solvent, and ethylcellulose as a binder. This paste was deposited on glass substrate by screen printing and extruded by syringe. After screen printing, several post-treatments were performed to control the alignment of CNTs perpendicular to the substrate. The deposited CNTs were scratched by sand paper or diamond lapping film. It was also treated by attachment followed by an immediate detachment using the adhesive tape. SEM observation indicates that excellent vertical alignment of CNTs could be achieved by simple post-treatments from the screen printed-CNTs paste. Similar alignment of CNTs is also observed in the as-extruded CNTs paste.

• Korean Journal of Optics and Photonics
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• v.29 no.5
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• pp.215-219
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• 2018

In this paper we show that the localized surface-plasmon resonance of Ag nanoparticles produced by laser dewetting can be effectively utilized for improving the photocurrent and efficiency of a dye-sensitized $TiO_2$ solar cell. An Ag thin film deposited on a conducting glass substrate was dewetted into nanoparticles by a pulsed laser. A dye-sensitized $TiO_2$ solar cell fabricated on this substrate containing the Ag nanoparticles exhibited improved photovoltaic performance, compared to a reference cell. This is attributed to the increased light trapping that arises from the localized surface-plasmon resonance of the dewetted Ag nanoparticles.

• Journal of the Korean Vacuum Society
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• v.16 no.5
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• pp.366-370
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• 2007

Nano-scopic holes which are distributed densely and uniformly were fabricated on $SiO_2$ surface. Self-assembling resists were used to produce a layer of uniformly distributed parallel poly methyl methacrylate (PMMA) cylinders in a polystyrene (PS) matrix. The PMMA cylinders were degraded and removed by acetic acid rinsing. Subsequently, PS nanotemplates were fabricated. The patterned holes of PS template were approximately $8{\sim}30\;nm$ wide, 40 nm deep, and 60 nm apart. The porous PS template was used as a dry etching mask to transfer the pattern of PS template into the silicon oxide thin film during reactive ion etching (RIE) process. The sizes of the patterned holes on $SiO_2$ layer were $9{\sim}33\;nm$. After pattern transfer by RIE, uniformly distributed holes of which size were in the range of $6{\sim}22\;nm$ were fabricated on Si substrate. Sizes of the patterned holes were controllable by PMMA molecular weight.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.295-295
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• 2014

일반적으로 박막 태양전지의 효율은 박막 종류에 따른 광 흡수율에 의해 결정되며, 이는 증착한 박막의 두께에 의해 결정된다. 증착한 박막의 두께가 두꺼워질수록 광 흡수율은 증가하지만, 박막 두께가 지나치게 두꺼워지면 열화 현상으로 인한 모듈의 효율 감소가 생기므로 적절한 박막의 두께가 요구된다. 특히 a-Si:H의 경우 가시광 영역에서 높은 흡수계수를 가지고 있어서 얇은 박막 두께로도 태양전지의 제작이 가능하지만, 동일한 박막 두께에서 효율을 더욱 향상시키기 위한 다양한 광 포획 기술에 대한 연구가 많이 진행 되고 있다. 본 연구에서는 자외선을 이용한 nano-imprint lithography 기술을 이용하여 a-Si:H 태양전지의 유리기판 위에 pattern을 삽입하여 광 산란 효과를 향상 시키고자 하였다. 또한 유리기판의 굴절률 (n=1.5)과 투명전극의 굴절률 (n=1.9)의 중간 값을 갖는 ZnO nanoparticles (n=1.7)이 분산 된 imprinting resin을 사용함으로써 점진적으로 굴절률을 변화시켜, 최종적으로 a-Si:H 층까지의 광 투과율을 높이고자 하였다. 제작한 기판의 종류는 다음과 같다. 첫 번째 기판으로는 유리기판 위에 ZnO nanoparticles이 분산 된 imprinting resin을 spin-coating 하여 점진적인 굴절률의 변화에 의한 투과도 향상을 확인하고자 하였다. 두 번째 기판으로는 규칙적인 배열을 갖는 micro 크기의 패턴을 형성하였다. 마지막으로는 불규칙한 배열을 갖는 nano 크기와 micro 크기가 혼재 된 패턴을 형성하여 투과도 향상과 동시에 빛의 산란을 증가시키고자 하였다. 후에 이 세가지 종류를 기판으로 사용하여 a-Si:H 기반의 박막 태양전지를 제작하였다. 먼저 제작한 박막 태양전지용 기판의 광학적 전기적 특성을 분석하였다. 유리 기판 위에 형성한 패턴에 의한 roughness 변화를 확인하기 위해 atomic force microscopy (AFM)를 이용하여 시편의 표면을 측정하였다. 또한 제작한 유리 기판 위에 투명 전극층을 형성 후, 이로 인한 전기적 특성의 변화를 확인하기 위해 hall measurement system을 이용하여 sheet resistance, carrier mobility, carrier concentration 등의 특성을 측정하였다. 또한, UV-visible photospectrometer 장비를 이용하여 각 공정마다 시편의 광학적 특성(투과도, 반사도, 산란도, 흡수도 등)을 측정하였고, 최종적으로 제작한 박막 태양전지의 I-V 특성과 외부양자효율을 측정하여 태양전지의 효율 변화를 확인하였다. 그 결과 일반적인 유리에 기판에 제작된 a-Si:H 기반의 박막 태양전지에 비해, ZnO nanoparticles이 분산 된 imprinting resin을 spin-coating 하여 점진적인 굴절률 변화를 준 것만으로도 약 12%의 태양전지 효율이 증가하였다. 또한, micro 크기의 패턴과 nano-micro 크기가 혼재된 패턴을 형성한 경우 일반적인 유리를 사용한 경우에 비해 각각 27%, 36%까지 효율이 증가함을 확인하였다.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.279-285
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• 2007

We have demonstrated structural evolution and optical properties of the Si-NWs on Si (111) substrates with synthesized nanoscale Au-Si islands by rapid thermal chemical vapor deposition(RTCVD). Au nano-islands (10-50nm in diameter) were employed as a liquid-droplet catalysis to grow Si-NWs via vapor-liquid-solid mechanism. Si-NWs were grown by a mixture gas of $SiH_4\;and\;H_2$ at pressures of $0.1{\sim}1.0$Torr and temperatures of $450{\sim}650^{\circ}C$. SEM measurements showed the formation of Si-NWs well-aligned vertically for Si (111) surfaces. The resulting NWs are 30-100nm in diameter and $0.4{\sim}12um$ in length depending on growth conditions. HR-TEM measurements indicated that Si-NWs are single crystals convered with about 3nm thick layers of amorphous oxide. In addition, optical properties of NWs were investigated by micro-Raman spectroscopy. The downshift and asymmetric broadening of the Si optical phonon peak with a shoulder at $480cm^{-1}$ were observed in Raman spectra of Si-NWs.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.5
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• pp.81-86
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• 2019

Metal oxide/graphene composites have been known as promising functional materials for advanced applications such as high sensitivity gas sensor, and high capacitive secondary battery. In this study, tin dioxide ($SnO_2$) nanostructures were grown on chemically synthesized graphene nanosheets using a two-zone horizontal furnace system. The large area graphene nanosheets were synthesized on Cu foil by thermal chemical vapor deposition system with the methane and hydrogen gas. Chemically synthesized graphene nanosheets were transferred on cleaned $SiO_2$(300 nm)/Si substrate using the PMMA. The $SnO_2$ nanostuctures were grown on graphene nanosheets at $424^{\circ}C$ under 3.1 Torr for 3 hours. Raman spectroscopy was used to estimate the quality of as-synthesized graphene nanosheets and to confirm the phase of as-grown $SnO_2$ nanostructures. The surface morphology of as-grown $SnO_2$ nanostructures on graphene nanosheets was characterized by field-emission scanning electron microscopy (FE-SEM). As the results, the synthesized graphene nanosheets are bi-layers graphene nanosheets, and as-grown tin oxide nanostructures exhibit tin dioxide phase. The morphology of $SnO_2$ nanostructures on graphene nanosheets exhibits complex nanostructures, whereas the surface morphology of $SnO_2$ nanostructures on $SiO_2$(300 nm)/Si substrate exhibits simply nano-dots. The complex nanostructures of $SnO_2$ on graphene nanosheets are attributed to functional groups on graphene surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.313-313
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• 2011

최근, 산화물 반도체를 통한 나노선 연구가 활발히 진행되고 있다. 1차원 나노선은 넓은 표면적을 가지며 다양한 특성을 지녀 미래 nanodevice로의 중요한 building block 소자로의 활용이 가능하다. 본 연구에서는 이종의 나노선을 합성하여 hierarchical nanojunction structure를 제작, 특성을 확인하였다. 이러한 구조는 나노선이 가지는 넓은 표면적의 특성과 동시에, multi-component fuctional nanodevice를 구현하는데에 적합한 구조이다. 본 연구는 텅스텐 기판 위에 고온의 열증착 방식을 이용하여 텅스텐 산화물 나노선을 제작시켜 그 위에 저온의 수열합성을 통한 산화아연 나노선을 제작한 후 향상된 field emission emitter로서의 특성을 살펴보았다. 합성된 텅스텐 산화물 나노선은 quasi-allign된 구조를 가지며, 이러한 구조 위에 ZnO를 스퍼터링하여 seed layer를 형성시키고, 암모니아수와 아연염을 이용한 수열합성법을 통하여 합성된 나노선 위에 nanobranch의 산화아연 나노선을 형성하였다. 이러한 성장특성은 SEM, TEM을 통하여 확인하였고 각각의 특성과 계면을 살펴보았다. 또한 이러한 구조를 이용하여 전계방출특성을 확인하였는데, 약 5.7 eV의 일함수를 갖는 텅스텐 산화물 나노선 위에 더 작은 값의 일함수를 갖는 산화아연 나노선을 합성하여 전계방출특성을 보았으며, 더 향상된 결과를 얻을 수 있었다. 또한 산화아연의 합성방법에 따른 전계방출 특성의 차이도 비교하였다.

• Journal of IKEEE
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• v.14 no.3
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• pp.219-223
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• 2010

In this study, we fabricated the HgSe nanoparticle-based thin film transistors (TFTs) of back gate structure with PVA gate dielectric. The fabricated TFTs show the improved electrical characteristics in the mobility of $16\;cm^2$/Vs and the on/off ratio of $10^4$ after annealing process at $100^{\circ}C$ for 5 min. AFM images demonstrate that the decrease in surface roughness according to annealing process leads to the improvement of electrical characteristics. The change in drain current caused from the conditions of flexible substrate is investigated under 0.6% strain.