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http://dx.doi.org/10.5757/JKVS.2009.18.6.481

Controlling the Diameter Size of Carbon Nanofilaments by the Cyclic on/off Modulation of C2H2/H2/SF6 Flow in a Thermal Chemical Vapor Deposition System  

Kim, Kwang-Duk (Department of Engineering in Energy & Applied Chemistry, Silla University)
Kim, Sung-Hoon (Department of Engineering in Energy & Applied Chemistry, Silla University)
Publication Information
Journal of the Korean Vacuum Society / v.18, no.6, 2009 , pp. 481-487 More about this Journal
Abstract
To control the diameter size of the carbon nanofilaments (CNFs), SF6 was incorporated in the source gases ($C_2H_2/H_2$) during the initial deposition stage. The source gases and $SF_6$ were manipulated as the cyclic on/off modulation of $C_2H_2/H_2/SF_6$ flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By $SF_6\;+\;H_2$ flow injection during the cycling etching interval time, the diameter size of CNFs was extremely decreased. The cause for the decrease in the diameter size of the individual CNFs by the cyclic on/off modulation process of $C_2H_2/H_2/SF_6$ flow was discussed in association with the slightly enhanced etching ability by the incorporation of $SF_6$.
Keywords
Carbon nanofilaments; Diameter size; Cyclic modulation process; Thermal chemical; vapor deposition;
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Times Cited By KSCI : 3  (Citation Analysis)
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