• 한국재료학회지
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• 제30권1호
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• pp.1-7
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• 2020

Doping or incorporation with exotic elements are two manners to regulate the optoelectronic properties of transparent conducting (TCO) cadmium oxide (CdO). Nevertheless, the method of doping host CdO by CdTe semiconductor is of high importance. The structural, optical, and electrical properties of CdTe-doped CdO films are studied for the sake of promoting their conducting parameters (CPs), including their conductivity, carrier concentration, and carrier mobility, along with transparency in the NIR spectral region; these are then compared with the influence of doping the host CdO by pure Te ions. X-ray fluorescence (XRF), X-ray diffraction (XRD), optical absorption spectroscopy, and electrical measurements are used to characterise the deposited films prepared by thermal evaporation. Numerous results are presented and discussed in this work; among these results, the optical properties are studied through a merging of concurrent BGN (redshift) and BGW (blue shift) effects as a consequence of doping processes. The impact of hydrogenation on the characterisations of the prepared films is investigated; it has no qualitative effect on the crystalline structure. However, it is found that TCO-CPs are improved by the process of CdTe doping followed by hydrogenation. The utmost TCO-CP improvements are found with host CdO film including ~ 1 %Te, in which the resistivity decreases by ~ 750 %, carrier concentration increases by 355 %, and mobility increases by ~ 90 % due to the increase of N_carr. The improvement of TCO-CPs by hydrogenation is attributed to the creation of O-vacancies because of H₂ molecule dissociation in the presence of Te ions. These results reflect the potential of using semiconductor CdTe -doped CdO thin films in TCO applications. Nevertheless, improvements of the host CdO CPs with CdTe dopant are of a lesser degree compared with the case of doping the host CdO with pure Te ions.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.145-145
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• 2010

In this paper, we report that the effects of hydrogen doping on the electrical and optical properties of typical transparent conducting oxide films such as ZnO and $SnO_2$ prepared by magnetron sputtering. Recently, density functional theory (DFT) calculations have shown strong evidence that hydrogen acts as a source of n-type conductivity in ZnO. In this work, the beneficial effect of hydrogen incorporation on Ga-doped ZnO thin films was demonstrated. It was found that hydrogen doping results a noticeable improvement of the conductivity mainly due to the increases in carrier concentration. Extent of the improvement was found to be quite dependent on the deposition temperature. A low resistivity of $4.0{\times}10^{-4}\;{\Omega}{\cdot}cm$ was obtained for the film grown at $160^{\circ}C$ with $H_2$ 10% in sputtering gas. However, the beneficial effect of hydrogen doping was not observed for the films deposited at $270^{\circ}C$. Variations of the electrical transport properties upon vacuum annealing showed that the difference is attributed to the thermal stability of interstitial hydrogen atoms in the films. Theoretical calculations also suggested that hydrogen forms a shallow-donor state in $SnO_2$, even though no experimental determination has yet been performed. We prepared undoped $SnO_2$ thin films by RF magnetron sputtering under various hydrogen contents in sputtering ambient and then exposed them to H-plasma. Our results clearly showed that the hydrogen incorporation in $SnO_2$ leads to the increase in carrier concentration. Our experimental observation supports the fact that hydrogen acting as a shallow donor seems to be a general feature of the TCOs.

• 전기화학회지
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• 제8권1호
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• pp.24-31
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• 2005

Ion-Shower-Doping장비 및 $PH_/3M_2$혼합 가스를 사용하여 Phosphorous를 ELA방법으로 제조된 Poly-Si에 가속 전압 및 조사량을 변수로 이온 주입하였다. As-implanted된 시편의 결정도는 UV-transmittance spectroscopy를 사용하여 측정하였다. 이 때 UV-transmittance를 이용하여 측정한 값은 Raman spectroscopy를 이용해서 측정한 값과 서로 관련되어 있음을 알았다. 면 저항은 가속전압이 1kV에서 15kV까지 증가함에 따라 감소한다 그러나 가혹한 도핑조건하에서는 가속전압의 증가 시 면 저항이 증가한다. 이는 활성화 열처리 후 치유되지 않은 결함에 의해 전자가 포획되며 이에 따라 전하 운반자의 농도가 감소하는 때문이다. 활성화 열처리는 로열처리, RTA 열처리, ELA 열처리 등의 방법으로 수행하였고 열처리 방법에 따르는 도펀트의 활성화 및 결함의 회복의 거동을 연구하였다

• 한국전기전자재료학회논문지
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• 제17권11호
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• pp.1212-1217
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• 2004

Red organic electroluminescent (EL) devices based on tris(8-hydroxyquinorine aluminum) (Alq$_3$) doped with red emissive materials, 4-(dicyanomethylene)-2-t-butyl -6-(l,1,7,7-tetramethyljulolidyl-9-enyl)4H-pyran (DCJTB). poly(3-hexylthiophene) (P3HT). rubrene and 4-dicyanomethylene-2-methyl-6[2-(2,3.6.7-tetrahydro-lH,5H-benzo-[i,j]quinolizin-8yl)vinyl]-4H-pyran (DCM2) were fabricated for applying to the red light source, The photoluminescence (pL) intensities of red emissive materials doped in Alq$_3$ are limited by the concentration quenching with increasing the doping ratio and the doping concentration of DCJTB, DCM2, P3HT and rubrene measured at the maximum intensity showed 5, 1, 0.5 and 2 wt%, respectively. Time-resolved PL dynamic results showed that the PL lifetime of red emissive materials doped in Alq$_3$ were increased more than the value of material itself. It means that the efficient energy transfer occurred in the mixed state and Alq$_3$ is a suitable host materials for red emissive materials, The device which was used DCJTB as a dopant achieved the best result of the maximum luminance of 594 cd/$m^2$ at 15 V and showed the chromaticity coordinates of x=0,624, y=0,371.

• 대한전자공학회논문지SD
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• 제45권6호
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• pp.22-27
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• 2008

4H-SiC의 전자와 정공의 이온화계수 $\alpha$와 $\beta$로부터 유효이온화계수 $\gamma$를 추출함으로써 4H-SiC 쇼트키 다이오드의 항복전압과 온-저항을 위한 해석적 모델을 유도하였다. 해석적 모델로부터 구한 항복전압을 실험 결과와 비교하였고, 도핑 농도 함수의 온-저항도 이미 발표된 결과와 비교하였다. 항복전압은 $10^{15}{\sim}10^{18}\;cm^{-3}$의 도핑 농도 범위에서 실험 결과와 10% 이내의 오차로 잘 일치하였다. 온-저항을 위한 해석적 결과는 $3{\times}10^{15}{\sim}2{\times}10^{16}\;cm^{-3}$의 범위에서 실험 결과와 매우 잘 일치하였다.

• 한국세라믹학회지
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• 제40권7호
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• pp.637-643
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• 2003

PDP(Plasma Display Panel)용 녹색 형광체의 발광특성과 결정성을 향상시키기 위해 Zn$_2$SiO$_4$:Mn에 co-dopant로 Cr과 Ti 를 각각 첨가하여 졸-겔법으로 합성하였다. 이렇게 합성된 Zn$_2$SiO$_4$:Mn, M(M=Cr, Ti) 형광체는 고상반응의 경우와 비교하여 상대적으로 낮은 온도인 110$0^{\circ}C$에서 willemite 구조의 단일상이 형성되었다. 제조된 Zn$_2$SiO$_4$:Mn, M(M=Cr, Ti) 형광체에 대하여 진공자외선(Vacuum Ultraviolet, VUV) 영역의 147 nm 여기광원을 사용하여 발광특성을 조사하였다. Co-dopant의 영향을 알아보기 위해 Mn의 농도는 2 ㏖%, $H_2O$/TEOS의 비율은 36.1로 고정하였고, 이때 Cr과 Ti 모두 0.1 ㏖%에서 가장 좋은 발광특성을 나타냈다. Cr이 co-doping된 경우는 농도가 증가할수록 잔광시간은 짧아지나 발광강도는 지속적으로 감소한 반면, Ti를 co-doping했을 때는 오히려 낮은 농도에서 발광강도의 증가를 보이며 2.0 ㏖%에서 급격히 감소하였다.

• 한국결정성장학회지
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• 제26권1호
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• pp.14-18
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• 2016

$Ce^{3+}$ 이온을 도핑한 $(Ce_xLu_{1-x})_3MgAl_3SiO_{12}$ 형광체 샘플을 고상합성법으로 합성하였다. 열처리 온도를 1250부터 $1550^{\circ}C$ 온도영역에서 조절하면서 5 h 동안 소성하였으며, 소성된 샘플들의 XRD와 PL 특성을 조사하여 가장 최적의 열처리 온도를 구하고자 하였다. 또한 $Ce^{3+}$ 이온의 도핑농도를 2.0에서 10.0 mol%로 변화시키면서 $Ce^{3+}$ 이온의 도핑농도와 광학적 특성과의 관계를 고찰하였다. $Ce^{3+}$ 이온의 도핑농도에 따른 형광체들의 PL 강도, 피크위치, 반치폭을 계산하여 실제적인 LED 패키징에 가장 적절한 Ce 도핑 농도를 구하고자 하였다. 또한 최적의 소성온도와 Ce 도핑농도 조건에서 합성한 형광체 샘플의 입도와 입형을 분석하였다.

• 센서학회지
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• 제20권1호
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• pp.1-7
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• 2011

Undoped and Sb-doped $SnO_2$ nanofibers were prepared by electrospinning and their responses to $H_2$, CO, $CH_4$, $C_3H_8$, and $C_2H_5OH$ were measured. In the undoped $SnO_2$ nanofibers, the gas response ($R_a/R_g$, $R_a$: resistance in air, $R_g$: resistance in gas) to 100 ppm $C_2H_5OH$ was very high(33.9), while that to the other gases ranged from 1.6 to 2.2. By doping with 2.65 wt% Sb, the response to 100 ppm $C_2H_5OH$ was decreased to 4.5, whereas the response to $H_2$ was increased to 3.0. This demonstrates the possibility of detecting a high $H_2$ concentration with minimum interference from $C_2H_5OH$ and the potential to control the gas selectivity by Sb doping.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.79-80
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• 2009

The local oxidation using an atomic force microscopy (AFM) is useful for Si-base fabrication of nanoscale structures and devices. SiC is a wide band-gap material that has advantages such as high-power, high-temperature and high-frequency in applications, and among several SiC poly types, 4H-SiC is the most attractive poly type due to the high electron mobility. However, the AFM local oxidation of 4H-SiC for fabrication is still difficult, mainly due to the physical hardness and chemical inactivity of SiC. In this paper, we investigated the local oxidation of 4H-SiC surface using an AFM. We fabricated oxide patterns using a contact mode AFM with a Pt/Ir-coated Si tip (N-type, $0.01{\sim}0.025\;{\Omega}cm$) at room temperature, and the relative humidity ranged from 40 to 50%. The height of the fabricated oxide pattern ($1{\sim}3\;nm$) on SiC is similar to that of typically obtained on Si ($10^{15}{\sim}10^{17}\;cm^{-3}$). We perform the 2-D simulation to further analyze the electric field between the tip and the surface. Whereas the simulated electric field on Si surface is constant ($5\;{\times}\;10^7\;V/m$), the electric field on SiC surface increases with increasing the doping concentration from ${\sim}10^{15}$ to ${\sim}10^{17}\;cm^{-3}$. We demonstrated that a specific electric field ($4\;{\times}\;10^7\;V/m$) and a doping concentration (${\sim}10^{17}\;cm^{-3}$) is sufficient to switch on/off the growth of the local oxide on SiC.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.139-143
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• 1997

The doping effects of Mg and/or Fe ions on congruent LiNbO$_3$ single crystal growth were studied in order to clarify the roles of MgO in Fe doped LiNbO$_3$ single crystals. The effective distribution coefficienct of Fe was found decreased drastically from 0.85 to 0.5 by the addition of MgO into the LiNbO$_3$ melt. M ssbauer spectra revealed that the addition of MgO reduces the occurrence of Fe2+ ions during growth in air. Therefore, it is likely that there would be two important roles of MgO in Fe doped LiNbO$_3$. One is to suppress the incorporation of all Fe ions, and the other is to reduce the concentration of Fe2+ ions among the total Fe ions.