• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• 대한기계학회논문집A
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• 제20권10호
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• 한국소음진동공학회논문집
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• 제12권2호
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.292-298
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• 2009

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.329-334
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• 2001

Recently, the high precision technology can not be developed continuously if we don't have anti vibration technology. Vibration isolation technology using an air spring and laminated robber bearing is widely used because it has excellent vibration isolation characteristics. We developed high precision vibration table with two good element(air spring and LRB) for semiconductor factory. Air Spring is used for isolating the vertical vibration and LRB is used for isolating the horizontal Vibration. As a result, It has D-Class degree in BBR-Criteria. In this paper, we talk about orifice characteristics in the self-damped air spring and design flow of the laminated robber bearing. The orifice characteristics is delicate shade of length and diameter. When we do experimentation to find orifice characteristics, length is fixed and diameter is changed. The orifice diameter is the wider and the air spring stiffness is the softer.

• 항공우주기술
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• 제8권2호
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• pp.113-121
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• 2009

발사환경 시 작용하는 진동 환경을 지상에서 구현하기 위해 가진 시스템을 이용하고 있다. 진동시험은 수직, 수평 방향에 대해 수행되며, 수평방향 시험의 경우 슬립테이블 시스템과 연계하여 시험을 수행하게 된다. 최근 개발 중인 대형 위성의 경우, 위성과 진동 시험기 사이의 연결 구조물의 하중 및 동적 설계 요구 조건을 만족하기 위하여 수평가진 시스템과 열 특성이 매우 다른 스틸 소재를 이용하여 제작하였다. 본 연구에서는 수평가진 시스템과 열팽창 계수가 다른 소재를 이용하는 대형 구조물의 열 특성 및 모멘트 검증 과정과 발생한 문제점을 개선하고자 적용한 안을 제시하고자 한다.

• 한국소음진동공학회논문집
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• 제21권9호
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Structural Engineering and Mechanics
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• 제28권6호
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• pp.677-694
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• 2008

A vibration power minimization model is developed, based on the mobility matrix method, for a vibration isolation system consisting of a vibrating source placed on an elastic support structure through multiple resilient mounts. This model is applied to investigate the design optimization of an X-Y motion stage-based vibration isolation system used in semiconductor wire-bonding equipment. By varying the stiffness coefficients of the resilient mounts while constraining the dynamic displacement amplitudes of the X-Y motion stage, the total power flow from the X-Y motion stage (the vibrating source) to the equipment table (the elastic support structure) is minimized at each frequency interval in the concerned frequency range for different stiffnesses of the equipment table. The results show that when the equipment table is relatively flexible, the optimal design based on the proposed vibration power inimization model gives significantly little power flow than that obtained using a conventional vibration force minimization model at some critical frequencies. When the equipment table is rigid enough, both models provide almost the same predictions on the total power flow.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.97-102
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

• 한국소음진동공학회논문집
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• 제17권6호
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• pp.515-523
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration Isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.