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http://dx.doi.org/10.5050/KSNVE.2011.21.9.858

Examination on Active Pneumatic Vibration Isolation Table with Moving Masses on It by Time Delay Control  

Shin, Yun-Ho (한국기계연구원 시스템다이나믹스실)
Moon, Seok-Jun (한국기계연구원 시스템다이나믹스실)
Chung, Jung-Hoon (한국기계연구원 시스템다이나믹스실)
Kim, Byung-Hyun (한국기계연구원 시스템다이나믹스실)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.21, no.9, 2011 , pp. 858-867 More about this Journal
Abstract
As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.
Keywords
Active Pneumatic Vibration Isolation Table; Time Delay Control; Moving Mass; XY-stage; Settling Time;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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