• International journal of advanced smart convergence
• /
• v.8 no.4
• /
• pp.200-206
• /
• 2019

In this study, we compared the VacCAD and VacSim^(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim^(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

• Journal of the Korean Vacuum Society
• /
• v.20 no.6
• /
• pp.387-394
• /
• 2011

Standard devices and procedures for measuring the pumping speed, one of the most important parameters indicating the operation performance of the vacuum pump, have been developed and widely utilized. Though the standard system has a firm theoretical basis, it is, sometimes, inevitable to alter something in the system for a practical purpose compared with ideal conditions, which may lead to a large measurement error. In this paper, characteristics and systematic errors of various ideal or practical schemes for measuring the pumping speed are analyzed, and compensation terms are proposed.

• Journal of the Korean Vacuum Society
• /
• v.15 no.1
• /
• pp.14-23
• /
• 2006

The scroll pump is widely used in ultra clean vacuum systems. However, there is no commonly available information on the hydrogen pumping characteristics of this pump, which creates a difficulty in determining whether the scroll pump can be used or not in a fusion experiment system where hydrogen ,is the main working gas. In this paper the experimental setup, measurement procedures, experimental results, and discussions on the pumping speed, the maximum compression ratio and the back-streaming properties of the scroll pump, especially for the hydrogen gas, are reported.

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.6
• /
• pp.86-95
• /
• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• Applied Science and Convergence Technology
• /
• v.24 no.5
• /
• pp.132-135
• /
• 2015

Schematic of RAON vacuum system is introduced. Vacuum test for superconducting cavity with liquid nitrogen is performed. Schematic plan for RAON vacuum system is introduced and vacuum control system for superconducting cavity test is constructed. Vacuum pressure of cavity is shown as a function of pumping time. The temperature of cavity is shown as a function of cooling time. Outgassing species from cavity is also detected. Detailed experimental procedure is presented to test the cavity vacuum with liquid nitrogen.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.28 no.11
• /
• pp.1359-1367
• /
• 2004

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

• Journal of the Korean Vacuum Society
• /
• v.22 no.2
• /
• pp.45-54
• /
• 2013

The cryopump of the pulse tube type has been developed successfully, and manufacturing of a prototype pump is finished under leading of Woosung Vacuum. The target pumping speed of the prototype pump is above 3,600 L/s for nitrogen with the intake port of 14 inches I.D (16 inches O.D). For designing optimally the pump structure including the charcoal array, thermal shield, and baffle, the pumping speed was simulated for various configurations through Monte Carlo method. Pumping performances of the protype cryopump manufactured on the basis of optimal design were conformed experimentally with a standard test system and procedures. The measured $N_2$ pumping speed of the prototype cryopump was 4,600 L/s which agreed well with simulated one and exceeded the target value.

• Journal of Korean Vacuum Science & Technology
• /
• v.7 no.2
• /
• pp.27-32
• /
• 2003

A large cryo-pumping system composed of 4 cryosorption pumps was designed and manufactured to satisfy the pressure requirements of the NBI test stand. The cryosorption pump consists of a thermal shield/baffle assembly and a cryopanel coated with activated carbon granules. The thermal shield is cooled by liquid nitrogen, and the cryopanel by a commercial helium refrigerator. The operation characteristics and vacuum performance of the cryosorption pump were investigated. The cooling down time of the cryopanel to 20 K was about 6 hours with a liquid nitrogen consumption rate of about 35 L/hr. The maximum pumping speed of the cryosorption pump for the hydrogen gas measured by the steady pressure method was about 90,000 L/s.

• Applied Science and Convergence Technology
• /
• v.24 no.4
• /
• pp.77-83
• /
• 2015

Many welding processes are performed to construct cryogenic system. Leak-tight for the cryogenic system is required at low temperature environment. Helium leak detection techniques are commonly used to find leak for the cryogenic system. The helium leak detection techniques for spraying, sniffing and pressurizing techniques are introduced. High vacuum is also necessary to use helium leak detector. So, types of fluid flow, effective temperature, conductance and pumping speed are introduced for vacuum pumping. Leak test procedure is shown for pipe welding, cryomodule and low temperature test. Cryogenic seals which include copper gasket, helicoflex gasket and indium are investigated.

• Journal of the Korean Vacuum Society
• /
• v.12 no.2
• /
• pp.93-104
• /
• 2003

For evaluation of durability of low vacuum pumps, it is required to examine the performance and degradation of low vacuum pumps. Pump degradation may result from abnormalities associated with the performance in many areas of pump operation. The diagnostics method can be used to monitor the pump performance in the semi-conductor process line. Based on the mechanical defect of the pump, the dynamic response and reliability of the system for performance test, and the dynamic characteristics of the pump were experimentally assessed. The theoretical work rate for the compression process in the pump was calculated, and then the efficiency of the pump associated with the power consumption was evaluated. This analysis will be useful in detecting pump degradation with increasing the power consumption. To determine the predominant factors of pump degradation, it is important to evaluate the entire pumping system. We studied vibration, dynamic pressure, pumping speed, and power consumption of low vacuum pumps. Our results can be utilized for the future research on the evaluating technology of durability of low vacuum pumps.