Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Dynamic Response of the System for Vacuum Pump Performance Evaluation

진공 펌프 성능 평가 계통의 동적 응답

  • 심우건 (한남대학교 기계공학과) ;
  • 임종연 (한국표준과학연구원 물리표준부 진공기술센터)
  • Published : 2004.11.01
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Abstract

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

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References

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