Browse > Article

Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing  

Khim, Gyung-Ho (한국기계연구원 지능기계연구센터)
Park, Chun-Hong (한국기계연구원 지능기계연구센터)
Lee, Hu-Sang (한국기계연구원 지능기계연구센터)
Kim, Seung-Woo (한국과학기술원 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.6, 2007 , pp. 86-95 More about this Journal
Abstract
This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.
Keywords
Vacuum-compatible air bearing; Differential exhaust system; Optimal design; Genetic algorithm; Degree of vacuum;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Jin, K. K., 'Genetic Algorithms and Their Applications,' Kyowoosa, 2002
2 Michalewicz, Z., 'Genetic Algorithms + Data Structures = Evolution Programs [Third, Revised and Extended Edition], Springer, 1999
3 Pham, D. T. and Jin, G, 'Genetic Algorithm using Gradient-like Reproduction Operator,' Electronics Letters, Vol. 31, No. 18, pp. 1558-1559, 1995   DOI
4 Sogard, M. R. and Spicer, D. F., 'Air Bearing Operable in a Vacuum Region,' US Patent No. US 6,126,169, 2000
5 Sogard, M. R., 'Fluid Bearing Operable in a Vacuum Region,' US Patent No. US 6,402,380, 2002
6 Khim, G, Park, C. H., Lee, H. and Kim, S. W., 'Performance Analysis of a Vacuum-Compatible Air Bearing,' Journal of the KSPE, Vol. 23, No. 10, pp. 102-112, 2006
7 Roth, A., 'Vacuum Technology (2nd, revised edition),' North-holland, pp. 62-88, 1982
8 Bae, S. H., In, S. R., Jung, K. H., Lee, Y. B. and Shin, Y. H., 'Vacuum Engineering,' The Korea Economic Daily Business Publication, pp. 61-116, 2000
9 Trust, D., 'Using Air Bearings in Vacuum to Control Stage Vibration,' Semiconductor International, pp.165-168, 2002
10 Yokomatsu, T. and Furukawa, M., 'Static Pressure Bearing,' US Patent No. US 4,749,283, 1988
11 Watson, D. C. and Novak, W. T., 'Air Bearing Linear Guide for Use in a Vacuum,' US Patent No. US 6,467,960, 2002
12 Higuchi, A., Kato, T. and Iwaski, K., 'Slide Apparatus and Its Stage Mechanism for Use in Vacuum,' US Patent No. US 6,510,755, 2003.
13 Takeda, M., 'Future Optical Disc Technology using Electron Beam Lithography,' JSPE, Vol. 70, No.3, pp. 322-325, 2004   DOI   ScienceOn
14 Novak, W. T. and Watson, D., 'Nikon Electron Projection Lithography System: Mechanical and Metrology Issues,' Proceeding of the ASPE, Vol. 22, pp. 517-520, 2000
15 Ohtsuka, M., Furukawa, M. and Higomura, M., 'The Vertical Traverse Stage in Vacuum Condition,' JSME Intemationaljoumal series III, Vol. 33, No. 1, pp. 61-64,1990
16 Wada, Y., 'Electron Beam Lithography with Rotation Stage,' JSPE, Vol. 70, No.3, pp. 318-321, 2004