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http://dx.doi.org/10.5757/JKVS.2013.22.2.45

Performance Estimation and Test of Protype Pulse Tube Cryopump  

In, Sang Ryul (Fusion Engineering Development Division, KAERI)
Kang, Sang Paek (Woosung Vacuum Ltd.)
Publication Information
Journal of the Korean Vacuum Society / v.22, no.2, 2013 , pp. 45-54 More about this Journal
Abstract
The cryopump of the pulse tube type has been developed successfully, and manufacturing of a prototype pump is finished under leading of Woosung Vacuum. The target pumping speed of the prototype pump is above 3,600 L/s for nitrogen with the intake port of 14 inches I.D (16 inches O.D). For designing optimally the pump structure including the charcoal array, thermal shield, and baffle, the pumping speed was simulated for various configurations through Monte Carlo method. Pumping performances of the protype cryopump manufactured on the basis of optimal design were conformed experimentally with a standard test system and procedures. The measured $N_2$ pumping speed of the prototype cryopump was 4,600 L/s which agreed well with simulated one and exceeded the target value.
Keywords
Pulse tube; Cryopump; Ptototype; Performance estimation; Test;
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